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首页> 外文期刊>International Journal of Modern Physics, B. Condensed Matter Physics, Statistical Physics, Applied Physics >Analytical modeling of the effects of electrostatic actuation and casimir force on the pull-in instability and static behavior of torsional nano/micro actuators
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Analytical modeling of the effects of electrostatic actuation and casimir force on the pull-in instability and static behavior of torsional nano/micro actuators

机译:静电激励和卡西米尔力对扭转纳米/微型激励器的拉入不稳定性和静态行为的影响的分析模型

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摘要

This paper studies the effect of Casimir force on the pull-in instability of electrostatically actuated torsional nano/micro actuators. Dependence of the actuator's pull-in angle and pull-in voltage on several design parameters are investigated and it is found that Casimir force can considerably reduce the stability limits of the torsional actuators. Nonlinear equilibrium equation is solved numerically and analytically using straight forward perturbation expansion method. It is observed that a fourth-order perturbation approximation can precisely model the behavior of a torsional actuator. The results of this paper can be used for safe and stable design of torsional nano/micro actuators.
机译:本文研究了卡西米尔(Casimir)力对静电驱动的扭转纳米/微型执行器的拉入不稳定性的影响。研究了执行器的吸合角和吸合电压对几个设计参数的依赖性,发现卡西米尔力可以大大降低扭转执行器的稳定性极限。非线性平衡方程采用直接摄动展开法进行数值和解析求解。可以看出,四阶摄动近似可以精确地模拟扭转致动器的行为。本文的结果可用于安全,稳定地设计扭转纳米/微型执行器。

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