Phase-shifting interferometry: minimization of systematic errors

Parameswaran Hariharan

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Phase-shifting interferometry: minimization of systematic errors

机译：相移干涉测量：最小化系统误差

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摘要

Phase-shifting interferometry is now used widely to map the deviations of optical surfaces from a reference plane or reference sphere. However, the accuracy of such measurements is limited by systematic errors due to several causes. These systematic errors can be minimized by a simple averaging technique.

机译：相移干涉测量现在被广泛用于绘制光学表面与参考平面或参考球的偏差。然而，由于多种原因，这种测量的准确性受到系统误差的限制。这些系统误差可以通过简单的平均技术最小化。

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来源
《Optical Engineering》 |2000年第4期|967-969|共3页
作者
Parameswaran Hariharan;
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作者单位

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
Interferometry; Phase shifting; Optical testing; Error reduction;

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2. A general method of designing phase-shifting algorithms for grating lateral shearing interferometry [J] . Chao FANG, Yang XIANG, Ke-qi QI 浙江大学学报（英文版）（C辑：计算机与电子） . 2018,第6期
3. Phase detection algorithm using step lengths deviation errors and Hough transform in phase-shifting interferometry [J] . Tania A. Ramirez-delreal, Miguel Mora-Gonzalez, Jesus Munoz-MacielFrancisco J. Casillas-RodriguezMarco A. Paz Optical Engineering . 2020,第7期

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4. Phase-shifting method contrast calculations in time-averaged interferometry: error analysis [J] . Krzysztof Patorski, Zbigniew Sienicki, Adam Styk Optical Engineering . 2005,第6期

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Phase-shifting interferometry: minimization of systematic errors

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