首页> 外文期刊>ECS Journal of Solid State Science and Technology >Mechanism of Modification of Fluorocarbon Polymer by Ultraviolet Irradiation in Oxygen Atmosphere
【24h】

Mechanism of Modification of Fluorocarbon Polymer by Ultraviolet Irradiation in Oxygen Atmosphere

机译:氧气气氛下紫外线辐照改性氟碳聚合物的机理

获取原文
获取原文并翻译 | 示例
           

摘要

A fluorocarbon polymer generated by plasma polymerization of CF4/CH2F2 used as a model polymer for sidewall residues was subjected to ultraviolet (UV) irradiation (X. = 254 nm). Fourier transform infrared spectroscopy and X-ray photoelectron spectrpscopy indicated that the as-deposited fluorocarbon polymer mainly contains CF, CF2, and a small concentration of unsaturated, fluorinated C=C bonds, and carbonyl functionalities. A partial removal of the polymer occurred during UV irradiation in oxygen. Experimental results showed that UV irradiation resulted in a slight decrease in fluorine content concomitant with the formation of carbonyl groups. The presence of reactive species such as oxygen during UV treatment (by production of singlet oxygen and radicals) was necessary to allow bond cleavage and an increase of hydrophilicity of the polymer fragments thus making the removal of the polymer possible in a subsequent wet clean. In terms of polymer bonding structure, the presence of C=C bonds and oxygen in the polymer backbone, in particular of C-0 bonds, was crucial for light absorption at the wavelength used and played a key role in the bond scissioning process. Quantum chemical calculation was also performed to support the experimental results.
机译:通过CF4 / CH2F2的等离子体聚合生成的碳氟化合物聚合物(用作侧壁残留物的模型聚合物)经过紫外线(X. = 254 nm)照射。傅立叶变换红外光谱和X射线光电子能谱表明,沉积后的碳氟聚合物主要包含CF,CF2和少量的不饱和氟化C = C键以及羰基官能团。在氧气中进行紫外线照射期间,聚合物被部分除去。实验结果表明,紫外线照射导致氟含量略有下降,同时羰基的形成。在紫外线处理期间(通过产生单线态氧和自由基),必须存在反应性物质(例如氧气),以使键裂解并增加聚合物片段的亲水性,从而在随后的湿法清洁中去除聚合物成为可能。就聚合物键合结构而言,聚合物主链中C = C键和氧的存在,特别是C-0键,对于所用波长的光吸收至关重要,并且在键断裂过程中起关键作用。还进行了量子化学计算以支持实验结果。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号