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首页> 外文期刊>Japanese journal of applied physics >Study of High-kappa/In0.53Ga0.47As Interface by Hard X-ray Photoemission Spectroscopy
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Study of High-kappa/In0.53Ga0.47As Interface by Hard X-ray Photoemission Spectroscopy

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We have investigated the effect of La2O3 interlayer insertion on the thermal stability of a high-kappa/In0.53Ga0.47As interface and the chemical bonding states at the high-kappa/In0.53Ga0.47As interface by hard X-ray (h nu = 7.94 keV) photoemission spectroscopy (HX-PES). The control of the oxide formation at the HfO2/In0.53Ga0.47As interface was tried by inserting La2O3, which has a large Gibbs free energy. Analyses of As 2p, Ga 2p, In 3d, Hf 3d, La 3d, and W 4f spectra show that the oxidation of In0.53Ga0.47As was suppressed by La2O3 interlayer insertion. We have also investigated the effect of surface treatment on the chemical bonding state of the In0.53Ga0.47As surface. (NH4)(2)S treatment can suppress the oxidation of the In0.53Ga0.47As surface. (C) 2011 The Japan Society of Applied Physics

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