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Small Scale Mechanical Characterization of Thin Foil Materials via Pin Load Microtesting

机译：通过针载荷微测试对薄箔材料进行小规模机械表征

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In situ scanning electron microscope (SEM) experiments, where small-scale mechanical tests are conducted on micro-and nanosized specimens, allow direct visualization of elastic and plastic responses over the entirety of the volume being deformed. This enables precise spatial and temporal correlation of slip events contributing to the plastic flow evidenced in a stress-strain curve. A new pin-loading methodology has been employed, in situ within the SEM, to conduct microtensile tests on thin polycrystalline metal foils. This approach can be tailored to a specific foil whose particular grain size may range from microns to tens of microns. Manufacture of the specialized pin grip was accomplished via silicon photolithography-based processing followed by subsequent focused ion beam finishing. Microtensile specimen preparation was achieved by combining a stencil mask methodology employing broad ion beam sputtering along with focused ion beam milling in the study of several metallic foil materials. Finite-element analyses were performed to characterize the stress and strain distributions in the pin grip and microspecimen under load. Under appropriately conceived test conditions, uniaxial stress-strain responses measured within these foils by pin-load microtensile testing exhibit properties consistent with larger scale tests.
机译：原位扫描电子显微镜（SEM）实验是在微米和纳米尺寸的样品上进行小规模的机械测试，可以直接观察整个变形体积内的弹性和塑性响应。这使得滑移事件在时间和空间上具有精确的相关性，从而有助于在应力-应变曲线中表明的塑性流动。在SEM内采用了一种新的销钉加载方法，对薄的多晶金属箔进行了微拉伸试验。该方法可以适合于特定的箔，其特定的晶粒尺寸可以在微米至数十微米的范围内。通过基于硅光刻的工艺以及随后的聚焦离子束精加工，可以完成专用销钉握持的制造。通过在多种金属箔材料的研究中结合采用宽离子束溅射的模板掩膜方法和聚焦离子束铣削来实现微拉伸试样的制备。进行了有限元分析，以表征负载下销钉夹具和显微样品中的应力和应变分布。在适当构思的测试条件下，通过针载荷微拉伸试验在这些箔片内测得的单轴应力-应变响应表现出与大规模试验一致的性能。

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