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首页> 外文期刊>Experimental Mechanics >Deflection Measurement and Determination of Young's Modulus of Micro-cantilever Using Phase-shift Shadow Moiré Method
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Deflection Measurement and Determination of Young's Modulus of Micro-cantilever Using Phase-shift Shadow Moiré Method

机译：相移阴影莫尔条纹法测量和测量微悬臂梁的杨氏模量

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摘要

The deflection of micro-structures have been previously measured using optical interferometry methods. In this study, the classical phase-shift shadow moiré method (PSSM) was applied to measure the deflection of a silicon micro-cantilever and to determine the Young's modulus of the cantilever material. The modulus value was determined from the profile based on deflection equation. A normal white light source and a grating of 40 line pairs per mm were used to generate the moiré fringes. Since the use of white light and high-resolution grating produces low contrast moiré fringes, the fringe visibility was enhanced by applying contrast enhancement and filtering techniques. The Young's modulus of the silicon cantilever material was estimated to be 165.9 GPa with an uncertainty of ±11.3 GPa (6.8%). The experimental results show that the PSSM method can be successfully applied for characterizing micro-cantilevers. Comparison of the deflection profile from the proposed method and a commercial 3-D optical profiler showed that the measurement range and sensitivity of PSSM are not affected by the poor contrast images.
机译：先前已经使用光学干涉法测量了微结构的挠曲。在这项研究中，经典的相移阴影莫尔条纹方法（PSSM）用于测量硅微悬臂梁的挠度并确定悬臂材料的杨氏模量。模量值是根据挠度方程从轮廓中确定的。使用普通的白光源和每毫米40条线对的光栅来产生莫尔条纹。由于使用白光和高分辨率光栅会产生低对比度的莫尔条纹，因此通过应用对比度增强和滤波技术可以提高条纹的可见性。硅悬臂材料的杨氏模量估计为165.9 GPa，不确定度为±11.3 GPa（6.8％）。实验结果表明，PSSM方法可以成功地用于表征微悬臂梁。通过比较所提出的方法和商用3-D光学轮廓仪的偏转轮廓，发现PSSM的测量范围和灵敏度不受差的对比度图像的影响。

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