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首页> 外文期刊>Experimental Thermal and Fluid Science: International Journal of Experimental Heat Transfer, Thermodynamics, and Fluid Mechanics >Experimental pool boiling investigations of FC-72 on silicon with artificial cavities and integrated temperature microsensors
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Experimental pool boiling investigations of FC-72 on silicon with artificial cavities and integrated temperature microsensors

机译：具有人造腔和集成温度微传感器的FC-72在硅上的实验池沸腾研究

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摘要

In this experimental study, fluorinert FC-72 is boiled on a silicon chip with artificial cavities and integrated microsensors. The horizontal silicon chip with dimensions of 39.5 x 19 x 0.38 mm is completely immersed in FC-72. The integrated nickel-titanium temperature microsensors on the back of the chip are calibrated individually and exhibit a near-linear increase of electrical resistance with temperature. The applied heat fluxes and the resulting wall superheat at the boiling surface are varied by means of an integral thin-film resistance heater (95% Al, 4% Cu and 1% Si), also on the back of the silicon chip. Artificial cylindrical cavities with a mouth diameter of 10 mu m and depths of 40, 80 or 100 mu m situated above the microthermometers serve as artificial nucleation sites, due to trapped vapour. Bubble growth rates, frequencies, departure diameters of bubbles and waiting times between bubbles from an isolated cavity for different wall superheats and pressures were obtained by analysing high-speed video images and the simultaneously measured temperature below the artificial cavity.
机译：在这项实验研究中，将氟rt FC-72煮沸在带有人造腔和集成微传感器的硅芯片上。尺寸为39.5 x 19 x 0.38 mm的水平硅芯片完全浸入FC-72中。芯片背面的集成镍钛温度微传感器经过单独校准，并且电阻随温度呈近乎线性的增长。借助集成的薄膜电阻加热器（95％的Al，4％的Cu和1％的Si），也在硅片的背面改变了施加的热通量和在沸腾表面上产生的壁过热。由于捕获的蒸气，位于微型温度计上方的口径为10微米，深度为40、80或100微米的人造圆柱形腔体是人造成核点。通过分析高速视频图像并同时测量人造腔体下方的温度，可以得出气泡的生长速度，频率，气泡的离开直径以及不同壁过热和压力下隔离腔体之间的气泡之间的等待时间。

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