Ecofriendly ozone-based wet processes for electron device fabrication

Hirozoh Kanegae

首页> 外文期刊>Mitsubishi Electric Advance >Ecofriendly ozone-based wet processes for electron device fabrication

【24h】

Ecofriendly ozone-based wet processes for electron device fabrication

机译：电子设备制造中基于臭氧的环保型湿法工艺

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Mitsubishi Electric has developed ozone-based wet processes for fabrication of LCDs and other semiconductor devices. These low-cost and low-environmental-impact processes use tiny amounts of chemical reactants and can be conducted at roomtemperature. This report introduces technology for contamination-free production of high-density ozone and ozonated water, and discusses use of ozonated water as a substitute for a standard RCA cleaning process and for the removal of photoresist.

机译：三菱电机开发了基于臭氧的湿法工艺，用于制造LCD和其他半导体器件。这些低成本和低环境影响的过程使用少量的化学反应物，并且可以在室温下进行。该报告介绍了无污染生产高密度臭氧和臭氧水的技术，并讨论了使用臭氧水代替标准RCA清洁工艺和去除光致抗蚀剂的方法。

著录项

来源
《Mitsubishi Electric Advance》 |1999年第9期|共5页
作者
Hirozoh Kanegae;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类一般性问题;
关键词

相似文献

外文文献
中文文献
专利

1. Ecofriendly ozone-based wet processes for electron device fabrication [J] . Hirozoh Kanegae Mitsubishi Electric Advance . 1999,第9期

机译：电子设备制造中基于臭氧的环保型湿法工艺
2. Improved Surface Passivation by Wet Texturing, Ozone-Based Cleaning, and Plasma-Enhanced Chemical Vapor Deposition Processes for High-Efficiency Silicon Heterojunction Solar Cells [J] . Anna Belen Morales-Vilches, Er-Chien Wang, Tobias Henschel, Physica status solidi . 2020,第4期

机译：通过湿法制绒，基于臭氧的清洁和等离子增强化学气相沉积工艺改善了高效硅异质结太阳能电池的表面钝化
3. Towards Integrated Molecular Electronic Devices:Characterization of Molecular Layer Integrity During Fabrication Processes [J] . Amr M. Mahmoud, Adam Johan Bergren, Nikola Pekas, Advanced Functional Materials . 2011,第12期

机译：迈向集成分子电子器件：制造过程中分子层完整性的表征
4. High volume manufacturing of optical MEMS devices using biomass nano-patterning materials and ecofriendly developable lithography processes [C] . Satoshi Takei Environmental effects on light propagation and adaptive systems . 2018

机译：使用生物质纳米图案材料和环保可开发光刻工艺的光学MEMS器件的大量生产
5. Development, Adaptation, and Characterization of Scalable Electronics Fabrication Processes for Devices and Components on Thin Flexible Glass [D] . Malay, Robert Edward, III. 2018

机译：可伸缩电子制造工艺的开发，适应和表征薄柔性玻璃上的装置和部件
6. Nanopiezoelectric Devices for Energy Generation Based on ZnO Nanorods/Flexible-Conjugated Copolymer Hybrids Using All Wet-Coating Processes [O] . Yu-Ping Lee, Chieh-Chuan Lin, Chih-Chung Hsiao, 2020

机译：基于ZnO纳米棒/柔性共轭共聚物杂化体的湿法生电纳米压电器件
7. A high-energy electron scattering study of the electronic structure and elemental composition of O-implanted Ta films used for the fabrication of memristor devices [O] . M. Vos, P. L. Grande, S. K. Nandi, 2013

机译：用于制造忆阻器装置的电子结构和元素组成的高能电子散射研究
8. Interfacial arsenic from wet oxidation of Al(sub x)Ga(sub 1-X)As/GaAs: Its effects on electronic properties and new approaches to MIS device fabrication [R] . Ashby, C. I. H. , Sullivan, J. P. , Newcomer, P. P. 1996

机译：来自al（sub x）Ga（sub 1-X）as / Gaas的湿氧化的界面砷：其对电子性质的影响和mIs器件制造的新方法

Ecofriendly ozone-based wet processes for electron device fabrication

摘要

著录项

相似文献

相关主题

期刊订阅