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Tip-sample relaxation as a source of uncertainty in nanoscale scanning probe microscopy measurements

机译：尖端样品松弛是纳米级扫描探针显微镜测量不确定性的来源

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摘要

Nanoscale dimensional measurements are very often focused on small objects formed by only a few atomic layers in one or more dimensions. The classical convolution approach to tip-sample artifacts cannot be valid for these specimens due to the quantum-mechanical nature of small objects. As interatomic forces act on the sample and the tip of the microscope, the atoms of both relax in order to reach equilibrium positions. This leads to changes in those quantities that are finally interpreted as the atomic force microscope (AFM) tip position and influences the resultant dimensional measurements. In this paper, sources of uncertainty connected with tip-surface relaxation at the atomic level are discussed. Results of both density functional theory modeling and of classical molecular dynamics of AFM scans on typical systems used in nanometrology, e.g., fullerenes and carbon nanotubes, on highly oriented pyrolytic graphite substrates are presented. We study also the effects of tip-surface relaxation on critical measurements of the dimensions of these objects.
机译：纳米尺度的测量通常集中在一个或多个维度上仅由几个原子层形成的小物体上。由于小物体的量子力学性质，针对尖端样本伪像的经典卷积方法对这些样本无效。当原子间力作用于样品和显微镜的尖端时，两者的原子松弛以达到平衡位置。这导致最终被解释为原子力显微镜（AFM）尖端位置的那些量的变化，并影响最终的尺寸测量。在本文中，讨论了与原子级尖端表面弛豫有关的不确定性来源。给出了密度函数理论建模和AFM扫描经典分子动力学的结果，这些结果在高度取向的热解石墨基板上用于纳米计量学的典型系统（例如富勒烯和碳纳米管）上。我们还研究了尖端表面松弛对这些物体尺寸的关键测量的影响。

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