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Characterization of nanoparticles by scanning electron microscopy in transmission mode

机译：透射电镜通过扫描电子显微镜表征纳米颗粒

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摘要

A conventional scanning electron microscope operated in transmission mode (TSEM) was used for imaging silica, gold and latex nanoparticles. Particles were applied to conventional transmission electron microscope (TEM) grids with different supporting films. A semiconductor detector capable of accomplishing both bright-field and dark-field imaging was used to record transmitted electrons. Particle diameter was determined from the images by comparing measured data with the results of corresponding Monte Carlo simulations which took into account particle and instrument properties. Measured and simulated line profiles agreed well; the method is sensitive to changes in diameter in the nano- and sub-nanometre range. It is concluded that TSEM imaging is a promising tool for dimensional characterization of nanoparticles. Necessary extensions to the technique in order to achieve traceable measurements are discussed.
机译：使用以透射模式操作的常规扫描电子显微镜（TSEM）对二氧化硅，金和胶乳纳米颗粒成像。将颗粒施加到具有不同支撑膜的常规透射电子显微镜（TEM）栅格上。使用能够完成明场和暗场成像的半导体检测器来记录透射的电子。通过将测量数据与考虑了颗粒和仪器特性的相应蒙特卡洛模拟的结果进行比较，从图像中确定粒径。测量和模拟的线轮廓吻合良好;该方法对纳米和亚纳米范围内的直径变化敏感。结论是，TSEM成像是用于纳米粒子尺寸表征的有前途的工具。为了实现可追溯的测量，讨论了对该技术的必要扩展。

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