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Geometrical modelling of scanning probe microscopes and characterization of errors

机译：扫描探针显微镜的几何建模和误差特征

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摘要

Scanning probe microscopes (SPMs) allow quantitative evaluation of surface topography with ultra-high resolution, as a result of accurate actuation combined with the sharpness of tips. SPMs measure sequentially, by scanning surfaces in a raster fashion: topography maps commonly consist of data sets ideally reported in an orthonormal rectilinear Cartesian coordinate system. However, due to scanning errors and measurement distortions, the measurement process is far from the ideal Cartesian condition. The paper addresses geometrical modelling of the scanning system dynamics, presenting a mathematical model which describes the surface metric x-, y- and z- coordinates as a function of the measured x'-, y'- and z'-coordinates respectively. The complete mathematical model provides a relevant contribution to characterization and calibration, and ultimately to traceability, of SPMs, when applied for quantitative characterization.
机译：扫描探针显微镜（SPM）可以精确地驱动并结合尖端的锋利度，从而可以超高分辨率对表面形貌进行定量评估。 SPM通过以光栅方式扫描表面来顺序测量：地形图通常由理想地以正交法线直角坐标系报告的数据集组成。但是，由于扫描误差和测量失真，测量过程与理想的笛卡尔条件相差甚远。该论文讨论了扫描系统动力学的几何模型，提出了一个数学模型，该模型描述了表面度量x-，y-和z-坐标分别作为所测x'-，y'-和z'-坐标的函数。当应用于定量表征时，完整的数学模型为SPM的表征和校准以及最终对可追溯性做出了重要贡献。

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