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Advanced three-dimensional scan methods in the nanopositioning and nanomeasuring machine

机译：纳米定位和纳米测量机中先进的三维扫描方法

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The nanopositioning and nanomeasuring machine developed at the Ilmenau University of Technology was originally designed for surface measurements within a measuring volume of 25 mm X 25 mm X 5 mm. The interferometric length measuring and drive systems make it possible to move the stage with a resolution of 0.1 nm and a positioning uncertainty of less than 10 nm in all three axes. Various measuring tasks are possible depending on the installed probe system. Most of the sensors utilized are one-dimensional surface probes; however, some tasks require measuring sidewalls and other three-dimensional features. A new control system, based on the I++ DME specification, was implemented in the device. The I++ DME scan functions were improved and special scan functions added to allow advanced three-dimensional scan methods, further fulfilling the demands of scanning force microscopy and micro-coordinate measurements. This work gives an overview of these new functions and the application of them for several different measurements.
机译：伊尔默瑙工业大学开发的纳米定位和纳米测量仪最初设计用于25 mm X 25 mm X 5 mm测量范围内的表面测量。干涉式长度测量和驱动系统使得在三个轴上以0.1 nm的分辨率和小于10 nm的定位不确定度移动载物台成为可能。根据所安装的探针系统，可以执行各种测量任务。使用的大多数传感器是一维表面探针;但是，某些任务需要测量侧壁和其他三维特征。在设备中实现了一个基于I ++ DME规范的新控制系统。对I ++ DME扫描功能进行了改进，并添加了特殊的扫描功能以允许使用高级三维扫描方法，从而进一步满足了扫描力显微镜和微坐标测量的要求。这项工作概述了这些新功能以及它们在几种不同测量中的应用。

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