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首页> 外文期刊>Measurement Science & Technology >Multiple interference and spatial frequencies' effect on the application of frequency-domain optical coherence tomography to thin films' metrology
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Multiple interference and spatial frequencies' effect on the application of frequency-domain optical coherence tomography to thin films' metrology

机译：多重干扰和空间频率对频域光学相干层析成像技术在薄膜计量中的应用

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摘要

Frequency-domain optical coherence tomography (FD-OCT) was proved to be very useful under two conditions: (i) the layered sample scatters so that multiple interferences do not exist and (ii) the interferometer uses collimated beams so that a single spatial frequency is used. We examine the use of FD-OCT for thin films' metrology when multiple interferences and a range of spatial frequencies exist, such as with interference microscopy where the spatial frequencies' content is provided by the numerical aperture (NA) of the microscope objectives. The effect of multiple interferences is found to be reduced significantly by shortening the coherence length such that it is less than the thinnest layer, and the smaller the number of layers, the higher the accuracy. For the spatial frequency effect, it is found that using microscope objectives with NA up to 0.3, the accuracy is still high with the advantage of providing full field operation and high lateral resolution; however, a correction factor has to be introduced for the determination of the thicknesses. An inverse scattering approach is proposed to improve the accuracy and allows the measurement of both thicknesses and dispersion laws and allows better accuracy than polarized reflectometry, in particular in the full field mode using annular lenses. Some experimental results are presented supporting the theoretical predictions.
机译：事实证明，频域光学相干断层扫描（FD-OCT）在两个条件下非常有用：（i）分层的样品散射，因此不存在多种干扰;（ii）干涉仪使用准直光束，因此单个空间频率用来。当存在多种干扰和一定范围的空间频率时，我们研究了FD-OCT在薄膜计量中的应用，例如，通过干涉显微镜，其中空间频率的含量由显微镜物镜的数值孔径（NA）提供。发现通过缩短相干长度以使其小于最薄层，可以显着降低多重干扰的影响，并且层数越少，精度越高。对于空间频率效应，发现使用NA最高为0.3的显微镜物镜，其精度仍然很高，具有提供全场操作和高横向分辨率的优势;然而，必须引入校正因子来确定厚度。提出了一种反向散射方法，以提高精度，并且可以测量厚度和色散定律，并且比偏振反射仪具有更好的精度，特别是在使用环形透镜的全场模式下。提出了一些实验结果以支持理论预测。

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