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首页> 外文期刊>Measurement Science & Technology >High-precision, low-coherence Fizeau interferometer using a pulsed laser diode for measurement of transparent plates
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High-precision, low-coherence Fizeau interferometer using a pulsed laser diode for measurement of transparent plates

机译：高精度，低相干Fizeau干涉仪，使用脉冲激光二极管测量透明板

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摘要

A high-precision, low-coherence Fizeau interferometer system using a pulsed laser diode has been developed for the measurement of the flatness of transparent plates. A pulsed laser diode with a wavelength of around 633 nm was used as the low-coherence light source. A Twyman-Green interferometer with the pulsed laser diode was connected to the Fizeau interferometer. By adjusting the optical path differences in both interferometers, the interference fringe pattern due only to the reference and measurement surfaces could be observed. The accuracy of the measurements was found to be similar to that of a conventional Fizeau interferometer.
机译：已经开发出一种使用脉冲激光二极管的高精度，低相干性的Fizeau干涉仪系统，用于测量透明板的平面度。低相干光源使用了波长约为633 nm的脉冲激光二极管。将带有脉冲激光二极管的Twyman-Green干涉仪连接到Fizeau干涉仪。通过调节两个干涉仪中的光程差，可以观察到仅由于参考和测量表面引起的干涉条纹图案。发现测量的精度与传统的Fizeau干涉仪相似。

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