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首页> 外文期刊>Measurement Science & Technology >A high precision microano CMM using piezoresistive tactile probes
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A high precision microano CMM using piezoresistive tactile probes

机译：使用压阻式触觉探头的高精度微型/纳米三坐标测量机

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摘要

To satisfy various demands of micro- and nanoscale-dimensional metrology, a coordinate measuring system based on a nano positioning and measuring machine (NMM) has been built. The measuring system is able to perform measurements by using sensors such as scanning force microscopes, stylus profilometers, optical fixed focus sensors and assembled cantilever probes. In recent years, two kinds of tactile microano CMM probes have been developed and coupled to the system. In such a way, the function of the device has been expanded from a metrological SFM to a microano CMM. In this paper, the development of the microano CMM is reported. The design ideas concerning the key components of the CMM, such as positioning stage, probe and software, are introduced. The characterization of the probe is described in more detail. Measurements on a typical test artefact have been demonstrated as an example.
机译：为了满足微米级和纳米级计量学的各种要求，已经建立了基于纳米定位和测量机（NMM）的坐标测量系统。该测量系统能够通过使用诸如扫描力显微镜，测针轮廓仪，光学固定焦点传感器和组装的悬臂式探头之类的传感器进行测量。近年来，已经开发了两种触觉式微/纳米CMM探针并将其与系统耦合。通过这种方式，设备的功能已从计量SFM扩展到微型/纳米CMM。本文报道了微米/纳米三坐标测量机的发展。介绍了有关坐标测量机关键部件的设计思想，例如定位台，测头和软件。探针的特性将更详细地描述。举例说明了对典型测试伪像的测量。

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