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首页> 外文期刊>Nano letters >Selective vibrational detachment of microspheres using optically excited in-plane motion of nanomechanical beams
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Selective vibrational detachment of microspheres using optically excited in-plane motion of nanomechanical beams

机译：纳米机械束的光激发面内运动使微球选择性振动脱离

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摘要

Optical excitation plays an important role in the actuation of higher flexural and torsional modes of nanoelectromechanical oscillators. We show that optical fields are efficient for excitation, direct control, and measurement of in-plane motion of cantilever-type nanomechanical oscillators. As a model system, 200- and 250-nm-thick single-crystal silicon cantilevers with dissimilar lengths and widths ranging from 6 to 12 mu m and 500 nm to 1 mu m, respectively, were fabricated using surface micromachining and dynamically analyzed using optical excitation and interferrometric detection. Three-dimensional finite element analysis incorporating shear, rotational inertia, cross-sectional deplanation, and nonideal boundary conditions due to the structural undercut describe the dynamics of the nanomechanical structures adequately. The quality factor of a particular in-plane harmonic was consistently higher than the transverse mode. The increased dissipation of the out-of-plane mode was attributed to material and acoustic loss mechanisms. The in-plane mode was used to demonstrate vibrational detachment of submicrometer polystyrene spheres on the oscillator surface. In contrast, the out-of-plane motion, even in the strong nonlinear impact regime, was insufficient for the removal of bound polystyrene spheres. Our results suggest that optical excitation of in-plane mechanical modes provide a unique mechanism for controlled removal of particles bound on the surface of nanomechanical oscillators.
机译：光学激励在纳米机电振荡器的较高弯曲和扭转模式的致动中起重要作用。我们表明，光场对于悬臂式纳米机械振荡器的激发，直接控制和面内运动的测量是有效的。作为模型系统，使用表面微加工制造了厚度分别为6至12微米和500纳米至1微米的200和250纳米厚的单晶硅悬臂，并进行了动态分析。激发和干涉测量。三维有限元分析，包括剪切，旋转惯性，横截面偏斜和由于结构咬边而引起的非理想边界条件，充分描述了纳米机械结构的动力学。特定面内谐波的品质因数始终高于横向模式。平面外模式耗散的增加归因于材料和声损耗机制。面内模式用于证明振荡器表面上亚微米级聚苯乙烯球的振动脱离。相反，即使在强烈的非线性冲击条件下，平面外运动也不足以去除结合的聚苯乙烯球。我们的结果表明，平面内机械模式的光激发提供了一种独特的机制，可控制地去除结合在纳米机械振荡器表面的颗粒。

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