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Transforming insulating rutile single crystal into a fully ordered nanometer-thick transparent semiconductor

机译:将绝缘金红石单晶转变为纳米级完整的透明半导体

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摘要

Rutile single crystals treated with ion-beam preferential etching (IBPE) are investigated with electrical transport and transmission electron microscopy. The initially insulating single crystals show the formation of an oxygen vacancy-rich, highly ordered, thin conducting layer, below a crystalline rutile TiO_2 surface layer. Carrier concentrations of 10~(19) cm ~(-3) and very high mobilities of the order of 300 cm2 V~(-1) s~(-1) are observed in the nanolayers. The observations indicate that rutile single crystals can be effectively transformed into controlled conducting material using IBPE for creating a new breakthrough in transparent conducting media.
机译:用电子传输和透射电子显微镜研究了用离子束优先刻蚀(IBPE)处理的金红石单晶。最初绝缘的单晶显示出在晶体金红石TiO_2表面层下方形成了一个富氧空位,高度有序的薄导电层。在纳米层中观察到载流子浓度为10〜(19)cm〜(-3),迁移率非常高,约为300 cm2 V〜(-1)s〜(-1)。观察结果表明,使用IBPE可以将金红石单晶有效地转变为受控的导电材料,从而在透明导电介质中创造新的突破。

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