Real-time detection of linear and angular displacements with a modified DVD optical head

Hwu ET; Hung SK; Yang CW; Huang KY; Hwang IS

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Real-time detection of linear and angular displacements with a modified DVD optical head

机译：使用改进的DVD光学头实时检测线性和角位移

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Here we demonstrate that an astigmatic detection system (ADS), constructed with a modified digital-versatile-disk (DVD) optical head, can achieve real-time measurement of a linear displacement and two-dimensional (2D) tilt angles with a high sensitivity. An atomic force microscope (AFM), using our detection system to sense the deflection of microfabricated cantilevers, can resolve single atomic steps on graphite surfaces with a noise level less than 0.04 nm in topographic images. This astigmatic detection system can even detect mechanical resonances due to thermal vibrations of microfabricated cantilevers. The high sensitivity, small detecting size and high bandwidth of this detection system is suitable for dynamic characterization of elements in micromachined components. Further optimization of the system will promise many other applications in diverse technological fields.

机译：在这里，我们演示了使用改进的数字多功能光盘（DVD）光学头构造的像散检测系统（ADS），可以以高灵敏度实时测量线性位移和二维（2D）倾斜角。原子力显微镜（AFM）使用我们的检测系统来感应微细悬臂的偏转，可以解析出地形图像中噪声水平小于0.04 nm的石墨表面上的单个原子台阶。这种散光检测系统甚至可以检测由于微细悬臂梁的热振动引起的机械共振。该检测系统的高灵敏度，小检测尺寸和高带宽适用于微加工部件中元素的动态表征。系统的进一步优化将有望在不同的技术领域中实现许多其他应用。

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来源
《Nanotechnology》 |2008年第11期|共7页
作者
Hwu ET; Hung SK; Yang CW; Huang KY; Hwang IS;
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正文语种 eng
中图分类一般工业技术;
关键词
ATOMIC-FORCE MICROSCOPE; INTERFEROMETER; ACCELEROMETER; PROFILOMETER; CANTILEVER; PROBE;

机译：原子力显微镜;干涉仪;加速度计;轮廓仪;悬臂;探头;

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1. Real-time detection of linear and angular displacements with a modified DVD optical head [J] . Hwu ET, Hung SK, Yang CW, Nanotechnology . 2008,第11期

机译：使用改进的DVD光学头实时检测线性和角位移
2. Detection and photothermal actuation of microcantilever oscillations in air and liquid using a modified DVD optical pickup [J] . Ulcinas Arturas, Picco Loren M., Berry Monica, Sensors and Actuators, A. Physical . 2016,第Null期

机译：使用改进的DVD光学拾取器检测和光热激活空气和液体中的微悬臂梁振动
3. Optical Design and Analysis of a Laser Expander for a Blu-ray Pickup Head for Synchronous Detection of the Tilt Angle and Displacement on the Test Plane [J] . Wen-Shing Sun, Yan-Nan Lin, Jenq-Yang Chang Japanese journal of applied physics . 2011,第9Issue2期

机译：用于同步检测测试平面上的倾斜角和位移的蓝光拾取头激光扩展器的光学设计和分析
4. DVD Optical-Head with Fluorescent Detection [C] . Matsui, T., Shimomura, . 2006

机译：具有荧光检测功能的DVD光头
5. Accuracy, reproducibility, and sources of error of the Ariel Performance Analysis System in measuring angular and linear displacement using wide angle lenses. [D] . Miller, Kathryn Ann. 1993

机译：Ariel性能分析系统在使用广角镜测量角度和线性位移时的准确性，可重复性和误差源。
6. An Analytical Model for Describing the Power Coupling Ratio between Multimode Fibers with Transverse Displacement and Angular Misalignment in an Optical Fiber Bend Sensor [O] . Wern Kam, Yong Sheng Ong, Sinead O’Keeffe, 2019

机译：描述光纤弯曲传感器中具有横向位移和角错位的多模光纤之间功率耦合比的解析模型
7. Detection and photothermal actuation of microcantilever oscillations in air and liquid using a modified DVD optical pickup [O] . Ulčinas, Artūras, Picco, Loren M., Berry, Monica, 2016

机译：使用改进的DVD光学拾取器检测和光热激活空气和液体中的微悬臂梁振动
8. Torque versus Angular Displacement Response of Human Head to -G sub x Impact Acceleration. [R] . Ewing, C. L., Thomas, D. J. 1974

机译：扭矩与人头角度位移响应对-G sub x冲击加速度的影响。

Real-time detection of linear and angular displacements with a modified DVD optical head

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