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Focused-ion-beam-based rapid prototyping of nanoscale magnetic devices

机译：基于聚焦离子束的纳米磁性设备快速原型制作

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In this tutorial, focused-ion-beam (FIB)-based fabrication is considered from a very unconventional angle. FIB is considered not as a fabrication tool that can be used for mass production of electronic devices, similar to optical and F-beam-based lithography, hut rather as a powerful tool to rapidly fabricate individual nanoscale magnetic devices for prototyping future electronic applications. Among the effects of FIB-based fabrication of magnetic devices, the influence of Ga~+-ion implantation on magnetic properties is presented. With help of magnetic force microscopy (MFM), it is shown that there is a critical doze of ions that a magnetic material can be exposed to without experiencing a change in the magnetic properties. Exploiting FIB from such an unconventional perspective is especially favourable today when the future of so many novel technologies depends on the ability to rapidly fabricate prototype nanoscale magnetic devices. As one of the most illustrative examples, the multi-billion-dollar data storage industry is analysed as the technology field that strongly benefited from implementing FJB in the above-described role. The essential role of FIB in the most recent trend of the industry towards perpendicular magnetic recording is presented. Moreover, other emerging and fast-growing technologies are considered as examples of nanoscale technologies whose future could strongly depend on the implementation of FIB in the role of a nanoscale fabrication tool for rapid prototyping. Among the other described technologies are 'ballistic' magnetoresistance, patterned magnetic media, magnetoresistive RAM (MRAM), and magnetic force microscopy.
机译：在本教程中，从非常常规的角度考虑了基于聚焦离子束（FIB）的制造。 FIB不被视为可用于电子设备的批量生产的制造工具，类似于基于光学和F光束的光刻技术，而是被视为快速制造单个纳米级磁性设备以用于未来电子应用原型的强大工具。在基于FIB的磁性器件制造中，提出了Ga〜+离子注入对磁性的影响。借助磁力显微镜（MFM），显示出存在离子的临界without睡，磁性材料可以暴露于其中，而不会发生磁性变化。当如此众多的新技术的未来取决于快速制造原型纳米级磁性器件的能力时，从这种非常规的角度利用FIB如今尤为有利。作为最具说明性的示例之一，数十亿美元的数据存储行业被分析为从上述角色中实施FJB受益匪浅的技术领域。介绍了FIB在垂直磁记录行业的最新趋势中的重要作用。此外，其他新兴和快速发展的技术也被视为纳米技术的示例，其未来可能在很大程度上依赖于FIB的实现，而FIB的作用是实现快速原型的纳米级制造工具。在其他描述的技术中，还有“弹道”磁阻，图案化磁介质，磁阻RAM（MRAM）和磁力显微镜。

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