Applications of silicon nanowires functionalized with palladium nanoparticles in hydrogen sensors

Chen ZH; Jie JS; Luo LB; Wang H; Lee CS; Lee ST

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Applications of silicon nanowires functionalized with palladium nanoparticles in hydrogen sensors

机译：钯纳米粒子功能化的硅纳米线在氢传感器中的应用

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Silicon nanowires (SiNWs) modified by palladium (Pd) nanoparticles were investigated for hydrogen detection. SiNWs were fabricated via a thermal evaporation method using tin (Sn) as the catalyst. The as-grown SiNWs were chemically treated to remove surface oxide and then coated with a thin layer of Pd nanoparticles. A gas sensor device was fabricated with the Pd-functionalized SiNWs. The sensor showed better sensitivity to hydrogen and faster responding time than the macroscopic Pd wire hydrogen sensor.

机译：研究了钯（Pd）纳米粒子修饰的硅纳米线（SiNWs）的氢检测。通过使用锡（Sn）作为催化剂的热蒸发法来制造SiNW。对生长的SiNW进行化学处理，以去除表面氧化物，然后涂上一层Pd纳米颗粒。用Pd官能化的SiNWs制造了一种气体传感器器件。与宏观的钯线氢气传感器相比，该传感器对氢气的灵敏度更高，响应时间更快。

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来源
《Nanotechnology》 |2007年第34期|共5页
作者
Chen ZH; Jie JS; Luo LB; Wang H; Lee CS; Lee ST;
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原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词
NANOSENSORS; FABRICATION; DEVICES; DNA;

机译：纳米传感器;制造;设备;DNA;

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专利

1. Applications of silicon nanowires functionalized with palladium nanoparticles in hydrogen sensors [J] . Chen ZH, Jie JS, Luo LB, Nanotechnology . 2007,第34期

机译：钯纳米粒子功能化的硅纳米线在氢传感器中的应用
2. A bottom-gate silicon nanowire field-effect transistor withn functionalized palladium nanoparticles for hydrogen gas sensors [J] . Choi Bongsik, Ahn Jae-Hyuk, Lee Jieun, Solid-State Electronics . 2015,第DECa期

机译：具有用于氢气传感器的功能化钯纳米粒子的底栅硅纳米线场效应晶体管
3. Self-heating hydrogen gas sensor based on an array of single suspended carbon nanowires functionalized with palladium nanoparticles [J] . Junyoung Seo, Yeongjin Lim, Heungjoo Shin Sensors and Actuators . 2017,第auga期

机译：基于由钯纳米粒子功能化的单悬浮碳纳米线阵列的自热氢气传感器
4. High-performance hydrogen sensor based on an array of single suspended carbon nanowires selectively functionalized with palladium nanoparticles [C] . Junyoung Seo, Yeongjin Lim, Heungjoo Shin IEEE International Conference on Micro Electro Mechanical Systems . 2017

机译：基于单悬浮碳纳米线阵列的高性能氢传感器，该碳纳米线被钯纳米粒子选择性地功能化
5. Nanowire-based devices for electronic and optical applications: Solution-gated silicon nanowire field effect transistors and one-dimensional gold nanoparticle arrays [D] . Hu, Wenchong 2010

机译：用于电子和光学应用的基于纳米线的设备：溶液门控硅纳米线场效应晶体管和一维金纳米粒子阵列
6. Chemically deposited palladium nanoparticles on graphene for hydrogen sensor applications [O] . Xiaohui Tang, Pierre-Antoine Haddad, Nathalie Mager, -1

机译：化学沉积在石墨烯上的钯纳米粒子用于氢传感器应用
7. Palladium/silicon nanowire Schottky barrier-based hydrogen sensors [O] . Karl Skucha, Zhiyong Fan, Kanghoon Jeon, 2014

机译：钯/硅纳米线肖特基势垒氢传感器

Applications of silicon nanowires functionalized with palladium nanoparticles in hydrogen sensors

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