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Displacement control of piezoelectric element by feedback of induced charge

机译：通过感应电荷的反馈来控制压电元件的位移

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摘要

This paper deals with a displacement control method of a piezoelectric actuator (piezo). When voltage is applied to conductive plates which are attached on both ends of a piezo, charges are induced on the conductive plates. This induced charge indicates the deformation of the piezo. Since the relationship between the deformation of the piezo and the induced charge has less hysteresis, the displacement of the piezo can be measured by observing the induced charge. In the case of step response, the displacement of the piezo can be controlled by the feedback of the induced charge as well as by a feedback of the displacement with other measuring instruments. This method can be used at a high driving frequency as the piezo is driven with a voltage source which has a low output impedance. [References: 16]
机译：本文讨论了压电致动器（压电）的位移控制方法。当将电压施加到附接在压电两端的导电板上时，在导电板上感应出电荷。该感应电荷指示压电体的变形。由于压电的变形和感应电荷之间的关系具有较小的磁滞，因此可以通过观察感应电荷来测量压电的位移。在阶跃响应的情况下，压电的位移可以通过感应电荷的反馈以及其他测量仪器的位移反馈来控制。该方法可以在高驱动频率下使用，因为压电是由具有低输出阻抗的电压源驱动的。 [参考：16]

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