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Applications of x-ray interferometer-generated Moire patterns

机译:X射线干涉仪产生的莫尔图案的应用

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A monolithic x-ray interferometer has been developed which provides a means of producing high-quality x-ray Moire fringes with readily controlled pitch (spacing). It was designed as a calibrator of sub-microradian angular displacements and it has successfully demonstrated the feasibility of the approach. The quality of its output, when combined with the phase imaging capabilities of interferometry and the latest generation of fringe analysis algorithms, suggests additional, novel applications. This paper first reviews the principles and performance of the system as an angular calibrator and then discusses the potential of x-ray Moire patterns in the form of an x-ray microscope and as a diagnostic tool for ultra-precision metrology. Demonstration results are given mostly in the form of images of fringe fields, since the point here is the production of original data suitable for processing by existing techniques. [References: 14]
机译:已经开发出一种单片X射线干涉仪,该单片X射线干涉仪提供了一种产生具有易于控制的间距(间距)的高质量X射线莫尔条纹的手段。它被设计为亚微弧度角位移的校准器,并且已经成功证明了该方法的可行性。当将其输出质量与干涉测量的相位成像功能以及最新一代的条纹分析算法结合使用时,可提供更多新颖的应用。本文首先回顾了该系统作为角校准器的原理和性能,然后讨论了以X射线显微镜形式和作为超精密计量学的诊断工具使用X射线莫尔条纹的潜力。演示结果主要以边缘场的图像形式给出,因为此处的重点是适合于通过现有技术进行处理的原始数据的生成。 [参考:14]

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