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The enhancement of luminescence in ion implanted Si quantum dots in SiO_2 matrix by means ofdose alignment and doping

机译:通过剂量对准和掺杂增强SiO_2基体中离子注入的Si量子点中的发光

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摘要

The Si~+ -dose dependence of the photoluminescence (PL) intensity at #lambda# 800 nm for SiO_2 with Si nanoinclusions (NIs) produced by ion implantation is studied. It is shown an this dependence is determined by the increase of the surface density of NIs, the mean size NIs being constant until they overlap. Doping by phosphorus enhances the PL due to the joint action of two mechanisms: (i) the supply of additional electrons from the donors to the conduction band of quantum dots and (ii) the passivation of dangling bonds by phosphorus atoms.
机译:研究了通过离子注入产生的具有Si纳米内含物(NIs)的SiO_2在#λ#800 nm处的光致发光(PL)强度的Si〜+剂量依赖性。结果表明,这种依赖性是由NI的表面密度的增加决定的,NI的平均大小在它们重叠之前是恒定的。磷的掺杂由于两种机理的共同作用而增强了PL:(i)从供体向量子点的导带提供额外的电子;(ii)磷原子对悬空键的钝化。

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