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Growth of low-density InAs/GaAs quantum dots on a substrate with an intentional temperature gradient by molecular beam epitaxy

机译:通过分子束外延在有意温度梯度的衬底上生长低密度InAs / GaAs量子点

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摘要

InAs was deposited by molecular beam epitaxy (MBE) on a GaAs substrate with an intentional temperature gradient from centre to edge. Two-dimensional (2D) to three-dimensional (3D) morphology evolution was found along the direction in which the substrate temperature was decreasing. Quantum dots (QDs) with density as low as approx 8 X 10~6 cm~(-2) were formed in some regions. We attribute the morphological evolution to the temperature-dependent desorption of deposited indium and the intermixing between deposited indium and gallium from the buffer.
机译:通过分子束外延(MBE)将InAs沉积在GaAs基板上,并从中心到边缘有故意的温度梯度。发现沿着基板温度下降的方向的二维(2D)至三维(3D)形态演变。在某些区域形成了密度低至约8 X 10〜6 cm〜(-2)的量子点(QD)。我们将形态学演化归因于沉积铟的温度依赖性解吸以及来自缓冲液的沉积铟和镓之间的混合。

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