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Room temperature observation of size dependent single electron tunneling in a sub-2nm size tunable Pt nanoparticle embedded metal-oxide-semiconductor structure

机译:小于2nm尺寸的可调谐Pt纳米粒子嵌入的金属氧化物半导体结构中的尺寸依赖性单电子隧穿的室温观察

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摘要

In this paper we report size dependent single electron tunneling behavior at room temperature in a metal-oxide-semiconductor structure with uniformly sized Pt nanoparticles embedded in an Al_2O_3 dielectric. The sub-2nm size Pt nanoparticles sandwiched between the Al_2O _3 layers are deposited by a unique tilted target sputter deposition technique which produces metal nanoparticles as small as 0.5nm with narrow size distributions at room temperature. The charging behavior of these nanoparticles shows clear single electron tunneling peaks due to the Coulomb blockade effect. Moreover, the average single electron addition energy and height of the single electron tunneling current strongly depend on the size of the Pt nanoparticle. These controllable single electron tunneling behaviors suggest a new route for fabrication of single electron devices.
机译:在本文中,我们报告了室温下在尺寸均匀的Pt纳米颗粒嵌入Al_2O_3电介质的金属氧化物半导体结构中,尺寸依赖的单电子隧穿行为。通过独特的倾斜靶溅射沉积技术沉积夹在Al_2O_3层之间的亚2nm大小的Pt纳米颗粒,该技术可产生小到0.5nm的金属纳米颗粒,在室温下具有窄的尺寸分布。这些纳米粒子的充电行为由于库仑阻挡效应而显示出清晰的单电子隧穿峰。此外,平均单电子加成能量和单电子隧穿电流的高度强烈地取决于Pt纳米颗粒的尺寸。这些可控的单电子隧穿行为提出了制造单电子器件的新途径。

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