Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam

S GHATNEKAR-NILSSON; J GRAHAM; R HULL

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Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam

机译：使用聚焦离子束制造的微机械悬臂设计阵列的多频响应

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We demonstrate arrays of cantilevers with different lengths, fabricated by focused ion beam milling. The arrays of oscillators generate a spectrum of different resonant frequencies, where each frequency correlates to the corresponding individual cantilever. The frequency response from all the cantilevers is collected from a single measurement under the same environment and conditions for the entire array. The mass response of the system generated the same DELTA_f/f_0 for the cantilevers, within 0.1 percent accuracy. We denote the method MFSAC: multi-frequency signal analysis from an array of cantilevers. The simultaneous detection of several frequencies in one spectrum has great benefits in mass sensor applications, offering the possibility for true label-free detection.

机译：我们演示了通过聚焦离子束铣削加工而成的具有不同长度的悬臂阵列。振荡器阵列产生不同谐振频率的频谱，其中每个频率与相应的单个悬臂相关。在整个阵列的相同环境和条件下，通过一次测量收集所有悬臂的频率响应。系统的质量响应为悬臂生成了相同的DELTA_f / f_0，精度在0.1％以内。我们表示方法MFSAC：悬臂阵列中的多频信号分析。在质量传感器应用中，同时检测一个频谱中的多个频率具有巨大优势，为真正的无标记检测提供了可能。

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《Nanotechnology》 |2006年第20期|共5页
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S GHATNEKAR-NILSSON; J GRAHAM; R HULL;
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1. Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam [J] . S GHATNEKAR-NILSSON, J GRAHAM, R HULL Nanotechnology . 2006,第20期

机译：使用聚焦离子束制造的微机械悬臂设计阵列的多频响应
2. Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing [J] . Hiro Tanaka, Masaki Shinkai, Yoji Shibutani, Journal of Vacuum Science & Technology . 2009,第5期

机译：使用双悬臂梁测试通过聚焦离子束诱导化学气相沉积制备的纳米柱的非线性大挠度
3. Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition [J] . Igaki J, Nakamatsu KI, Kometani R, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2006,第6期

机译：聚焦离子束化学气相沉积法制备类金刚石碳悬臂的力学特性及应用
4. Electron beam characterization of double gate field emitter arrays fabricated by a focused ion beam assisted process [C] . Helfenstein Patrick, Jefimovs Konstantins, Kirk Eugenie, 2012 25th International Vacuum Nanoelectronics Conference. . 2012

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5. Focused ion beam milled magnetic cantilevers. [D] . Fraser, Alastair Edward. 2010

机译：聚焦离子束铣削的磁性悬臂梁。
6. Actuation of higher harmonics in large arrays of micromechanical cantilevers for expanded resonant peak separation [O] . Nir Dick, Christopher B. Wallin, Slava Krylov, -1

机译：在大型微机械悬臂阵列中驱动高次谐波以扩展共振峰分离
7. I. THE THEORY OF ABERRATIONS OF QUADRUPOLE FOCUSING ARRAYS. II. ION OPTICAL DESIGN OF HIGH QUALITY EXTRACTED SYNCHROTRON BEAMS WITH APPLICATION TO THE BEVATRON [O] . Meads Jr., Philip Francis 1963

机译：一，四极子聚焦阵列的偏差理论。 II。高质量提取同步光束的离子光学设计及其在BEVaTRON中的应用
8. THE THEORY OF ABERRATIONS OF QUADRUPOLE FOCUSING ARRAYS ION OPTICAL DESIGN OF HIGH QUALITY EXTRACTED SYNCHROTRON BEAMS WITH APPLICATION TO THE BEVATRON [R] . Philip Francis Meads 1963

机译：四极聚焦阵列的偏差理论对高质量提取同步光束的光学设计应用于BEVaTRON

Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam

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