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首页> 外文期刊>Nanotechnology >Room temperature amorphous to nanocrystalline transformation in ultra-thin films under tensile stress: An in situ TEM study
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Room temperature amorphous to nanocrystalline transformation in ultra-thin films under tensile stress: An in situ TEM study

机译：拉伸应力下超薄膜在室温下从非晶态到纳米晶的转变：原位TEM研究

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The amorphous to crystalline phase transformation process is typically known to take place at very high temperatures and facilitated by very high compressive stresses. In this study, we demonstrate crystallization of amorphous ultra-thin platinum films at room temperature under tensile stresses. Using a micro-electro-mechanical device, we applied up to 3% uniaxial tensile strain in 3-5 nm thick focused ion beam deposited platinum films supported by another 3-5 nm thick amorphous carbon film. The experiments were performed in situ inside a transmission electron microscope to acquire the bright field and selected area diffraction patterns. The platinum films were observed to crystallize irreversibly from an amorphous phase to face-centered cubic nanocrystals with average grain size of about 10 nm. Measurement of crystal spacing from electron diffraction patterns confirms large tensile residual stress in the platinum specimens. We propose that addition of the externally applied stress provides the activation energy needed to nucleate crystallization, while subsequent grain growth takes place through enhanced atomic and vacancy diffusion as an energetically favorable route towards stress relaxation at the nanoscale.
机译：通常已知非晶态到结晶态的相变过程发生在非常高的温度下，并且由于非常高的压应力而变得容易。在这项研究中，我们证明了室温下拉伸应力下非晶态超薄铂膜的结晶。使用微机电装置，我们在3-5 nm厚的聚焦离子束沉积的铂膜中施加了高达3％的单轴拉伸应变，该铂膜由另一3-5 nm厚的非晶碳膜支撑。在透射电子显微镜内原位进行实验，以获取明场和选定区域的衍射图样。观察到铂膜从非晶相不可逆地结晶为平均晶粒尺寸为约10 nm的面心立方纳米晶体。从电子衍射图样测得的晶体间距证实了铂试样中较大的拉伸残余应力。我们提出，外部施加的应力的增加提供了成核所需的活化能，而随后的晶粒生长则通过增强的原子和空位扩散而发生，这是在纳米级实现应力松弛的能量有利途径。

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