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A multi-level capacitor-less memory cell fabricated on a nano-scale strained silicon-on-insulator

机译:在纳米级绝缘体上应变硅上制造的多级无电容器存储单元

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A multi-level capacitor-less memory cell was fabricated with a fully depleted n-metal-oxide-semiconductor field-effect transistor on a nano-scale strained silicon channel on insulator (FD sSOI n-MOSFET). The 0.73% biaxial tensile strain in the silicon channel of the FD sSOI n-MOSFET enhanced the effective electron mobility to ~ 1.7 times that with an unstrained silicon channel. This thereby enables both front-and back-gate cell operations, demonstrating eight-level volatile memory-cell operation with a 1ms retention time and 12νA memory margin. This is a step toward achieving a terabit volatile memory cell
机译:在绝缘体(FD sSOI n-MOSFET)的纳米级应变硅沟道上,使用完全耗尽的n-金属氧化物半导体场效应晶体管制造了多级无电容器存储单元。 FD sSOI n-MOSFET的硅沟道中0.73%的双轴拉伸应变将有效电子迁移率提高到无应变硅沟道的1.7倍。因此,这可以实现前栅极和后栅极单元操作,从而以1ms的保留时间和12μA的存储裕度演示了八级易失性存储单元操作。这是朝着实现太比特易失性存储单元迈进的一步

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