A precision micropositioning system with a highdisplacement resolution and wide motion range has been requiredfor industrialized applications for a long time. This paperdiscusses the design and the characteristics of a new piezodrivenprecision micropositioning stage utilizing flexure hinges. Two-grade amplifying and a monolithic symmetrical mechanism areadopted in the design. An analytical model is presented and aseries of formulae for the static and dynamic behaviour of thestage are derived. Based on the theoretical analysis, the optimumdesign schema is put forward. The experimental demonstration tostudy the performance of the stage is described, and the methodfor reducing nonlinearity errors is proposed. The experimentalresults are in close agreement with those predicted by the theoretical analysis.
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