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首页> 外文期刊>Nanotechnology >Pulsed laser deposition of nanocrystalline lead zirconate titanate thin films
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Pulsed laser deposition of nanocrystalline lead zirconate titanate thin films

机译：脉冲激光沉积纳米晶锆钛酸钛薄膜

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摘要

Nanocrystalline ferroelectric thin films areobtained by pulsed laser deposition from a target prepared bysintering at approximately 700℃ nanosized powders of Pb (Zr0.52 Ti0.48)O3(PZT) with 1% weight addition of Nb2O5. Thepowder was prepared by spray-drying and it was calcinated at 500℃. Film deposition is performed on Si (100) and Au/Si (100)substrates in a reactive oxygen atmosphere using a pulsed Nd-YAG laser with energy 0.3 J/pulse, wavelength 1064 nm, pulseduration 10 ns and frequency 10Hz. The film samples areinvestigated by scanning electron microscopy (SEM),x-raydiffraction (XRD), energy dispersive spectroscopy (EDS) anddielectric measurements. The crystallite dimension of PZT filmshas been found through morphological analysis to be about 30-40 nm. A broadening of the dielectric constant peak at theferroelectric transition temperature due to finite-size effects isobserved. The critical coefficient γin the Curie-Weiss law isfound to be 1.85 which is indicative of a partially diffused phase transition.
机译：通过脉冲激光沉积从靶材获得纳米晶铁电薄膜，该靶材是在约700℃烧结1％重量添加Nb2O5的Pb（Zr0.52 Ti0.48）O3（PZT）纳米级粉末制成的。通过喷雾干燥制备粉末，并在500℃下煅烧。使用具有能量0.3 J /脉冲，波长1064 nm，脉冲持续时间10 ns和频率10Hz的脉冲Nd-YAG激光在活性氧气氛中在Si（100）和Au / Si（100）基板上执行膜沉积。通过扫描电子显微镜（SEM），X射线衍射（XRD），能量色散光谱（EDS）和介电测量研究薄膜样品。通过形态分析发现PZT膜的微晶尺寸为约30-40nm。观察到由于有限尺寸效应，在铁电转变温度处的介电常数峰变宽。发现居里-魏斯定律中的临界系数γ为1.85，其指示部分扩散的相变。

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