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A servomechanism for a micro-electromechanical-system-based scanning-probe data storage device

机译：用于基于微机电系统的扫描探针数据存储装置的伺服机构

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Micro-electro-mechanical-system (MEMS)-based scanning-probe data storage devices are emerging as potential ultra-high-density, low-access-time, and low-power alternatives to conventional data storage. One implementation of probe-based storage uses thermomechanical means to store and retrieve information in thin polymer films. One of the challenges in building such devices is the extreme accuracy and the short latency required in the navigation of the probes over the polymer medium. This paper focuses on the design and characterization of a servomechanism to achieve such accurate positioning in a probe-based storage prototype. In our device, the polymer medium is positioned on a MEMS scanner with x/y-motion capabilities of about 100 mu,m. The device also includes thermal position sensors that provide x/y-position information to the servo controller. Based on a discrete state-space model of the scanner dynamics, a controller is designed using the linear quadratic Gaussian approach with state estimation. The random seek performance of this approach is evaluated and compared with that of the conventional proportional, integrator, and derivative (PID) approach. The results demonstrate the superiority of the state-space approach, which achieves seek times of about 4 ms in a +/-50 mum range. Finally, the experimental results show that closed-loop track following using the thermal position-sensor signals is feasible and yields a position-error standard deviation of approximately 2 nm.
机译：基于微机电系统（MEMS）的扫描探针数据存储设备正在成为传统数据存储的潜在超高密度，低访问时间和低功耗替代品。基于探针的存储的一种实施方式使用热机械方法来存储和检索聚合物薄膜中的信息。构建这样的设备的挑战之一是探针在聚合物介质上导航所需的极高的准确性和较短的等待时间。本文重点研究伺服机构的设计和特性，以在基于探针的存储原型中实现如此精确的定位。在我们的设备中，聚合物介质放置在MEMS扫描仪上，其x / y运动能力约为100μm。该设备还包括热位置传感器，可向伺服控制器提供x / y位置信息。基于扫描仪动力学的离散状态空间模型，使用带有状态估计的线性二次高斯方法设计控制器。评估了该方法的随机寻道性能，并将其与常规比例，积分和微分（PID）方法的性能进行了比较。结果证明了状态空间方法的优越性，该方法在+/- 50微米范围内实现了约4毫秒的寻道时间。最后，实验结果表明，使用热位置传感器信号进行闭环跟踪是可行的，并且产生的位置误差标准偏差约为2 nm。

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