We report an experimental demonstration of an integrated biochemical sensor based on a slot-waveguidemicroring resonator. The microresonator is fabricated on a Si_(3)N_(4)-SiO_(2) platform and operates at a wavelength of 1.3 (mu)m. The transmission spectrum of the sensor is measured with different ambient refractive indices ranging from n velence 1.33 to 1.42. A linear shift of the resonant wavelength with increasing ambient refractive index of 212 nm/refractive index units (RIU) is observed. The sensor detects a minimal refractive index variation of 2 X 10~(-4) RIU.
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机译：我们报告了基于缝隙波导微环谐振器的集成生化传感器的实验演示。该微谐振器被制造在Si_（3）N_（4）-SiO_（2）平台上，并且在1.3μm的波长下工作。传感器的透射光谱是用从1.33到1.42的不同环境折射率测量的。观察到谐振波长随环境折射率的增加而线性变化（212纳米/折射率单位（RIU））。传感器检测到的最小折射率变化为2 X 10〜（-4）RIU。
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