Synthetic infrared spectra

Sinclair MB; Butler MA; Kravitz SH; Zubrzycki WJ; Ricco AJ

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Synthetic infrared spectra

机译：合成红外光谱

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We have designed, microfabricated, and characterized a diffractive optical element that reproduces the infrared spectrum of HF from 3600 to 4300 cm(-1). The reflection-mode diffractive optic consists of 4096 Lines, each 4.5 mu m wide, at 16 discrete depths relative to the substrate from 0 to 1.2 mu m and was fabricated upon a silicon wafer by anisotropic reactive ion-beam etching in a four-mask-level process. We envisage the use of diffractive optical elements of this type as the basis for a new class of miniaturized, remote chemical sensor systems based on correlation spectroscopy. (C) 1997 Optical Society of America.

机译：我们设计，微制造和表征了一种衍射光学元件，该元件可复制HF的红外光谱，范围为3600至4300 cm（-1）。反射模式衍射光学器件由4096条线组成，每条线宽4.5μm，相对于基板的16个离散深度（从0到1.2μm）位于16个离散深度上，并通过在四掩模中各向异性反应性离子束刻蚀在硅晶片上制成级流程。我们设想使用这种类型的衍射光学元件作为基于相关光谱的一类新型的小型远程化学传感器系统的基础。（C）1997年美国眼镜学会。

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《Optics Letters》 |1997年第13期|共3页
作者
Sinclair MB; Butler MA; Kravitz SH; Zubrzycki WJ; Ricco AJ;
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正文语种 eng
中图分类光学;
关键词
DIFFRACTIVE OPTICS;

机译：衍射光学;

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Synthetic infrared spectra

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