Scanning Michelson interferometer for imaging surface acoustic wave fields

J. V. Knuuttila; P. T. Tikka; M. M. Salomaa

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Scanning Michelson interferometer for imaging surface acoustic wave fields

机译：扫描迈克尔逊干涉仪对表面声波场成像

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A scanning homodyne Michelson interferometer is constructed for two-dimensional imaging of high-frequency surface acoustic wave (SAW) fields in SAW devices. The interferometer possesses a sensitivity of ～10~(-5) nm/(Hz)~(1/2), and it is capable of directly measuring SAW's with frequencies ranging from 0.5 MHz up to 1 GHz. The fast scheme used for locating the optimum operation point of the interferometer facilitates high measuring speeds, up to 50,000 points/h. The measured field image has a lateral resolution of better than 1 μm. The fully optical noninvasive scanning system can be applied to SAW device development and research, providing information on acoustic wave distribution that cannot be obtained by merely electrical measurements.

机译：构造了一个扫描零差迈克尔逊干涉仪，用于对声表面波器件中的高频表面声波（SAW）场进行二维成像。干涉仪的灵敏度为〜10〜（-5）nm /（Hz）〜（1/2），能够直接测量0.5 MHz至1 GHz范围内的声表面波。用于确定干涉仪最佳操作点的快速方案有助于实现高达50,000点/ h的高测量速度。测量的场图像的横向分辨率优于1μm。全光无创扫描系统可以应用于声表面波设备的开发和研究，提供仅通过电学测量无法获得的声波分布信息。

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《Optics Letters》 |2000年第9期|共3页
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J. V. Knuuttila; P. T. Tikka; M. M. Salomaa;
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中图分类光学;
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1. Scanning Michelson interferometer for imaging surface acoustic wave fields [J] . J. V. Knuuttila, P. T. Tikka, M. M. Salomaa Optics Letters . 2000,第9期

机译：扫描迈克尔逊干涉仪对表面声波场成像
2. Stabilized detection scheme of surface acoustic wavesby Michelson interferometer [J] . OLEH MOKRYY, VOLODYMYR KOSHOVYY, IGOR ROMANYSHYN, Optica applicata . 2010,第2期

机译：迈克尔逊干涉仪稳定的声表面波检测方案
3. 200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system [J] . Ch. Thomas, R. Heiderhoff, L. J. Balk Applied Physics Letters . 2007,第14期

机译：用于扫描电子/扫描探针显微镜混合系统中表面声波近场分析的200英尺灵敏度
4. High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup [C] . Holger Knell, Peter Lehmann Conference on optical measurement systems for industrial inspection VIII . 2013

机译：在行扫描迈克尔逊干涉仪设置中基于载流子条纹图案对镜面进行高速测量
5. Acquisition and registration of 3D optical surface scanning, MRI, and microwave tomographic imaging for improved clinical breast imaging and surgical planning. [D] . Pallone, Matthew John. 2013

机译：采集和注册3D光学表面扫描，MRI和微波层析成像，以改善临床乳房成像和手术计划。
6. Near-Field to Far-Field RCS Prediction on Arbitrary Scanning Surfaces Based on Spherical Wave Expansion [O] . Woobin Kim, Hyeong-Rae Im, Yeong-Hoon Noh, 2020

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7. Characteristic measurement of a surface acoustic wave nano-stepping motor by using a fiber-optic Michelson interferometer [O] . Tai-Ho Yu 2019

机译：使用光纤迈克尔逊干涉仪表面声波纳米步进电机的特征测量
8. Pyroelectric Surface Acoustic Wave Scanned Imager Analysis and Testing. [R] . rahn, j. p. 1978

机译：热释电表面声波扫描成像仪分析与测试。

Scanning Michelson interferometer for imaging surface acoustic wave fields

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