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Resolution enhancement in a reflection mode near-field optical microscope by second-harmonic modulation signals

机译:通过二次谐波调制信号提高反射模式近场光学显微镜的分辨率

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The motion of the probe tip in a near-field scanning optical microscope, dithered by vibration of a tuning fork, can modulate the reflection signal from the sample surface not only at the fundamental dithering frequency but also at its second harmonic. By lock-in amplification of these modulated signals, enhanced optical images are obtained, even with an uncoated fiber probe. In particular, accurate optical images with higher resolution are obtained when the second-harmonic signal is detected, which results from the parametric modulation of the tip-sample separation at the double frequency of the horizontal dithering motion of the tip. Using a DVD ROM with a track pitch of 0.74 μm as a test sample, we observed that the sharp edges around the pits are clearly resolved with the second-harmonic signals and obtained enhanced resolution of ~70 nm full width at half-maximum.
机译:探针在近场扫描光学显微镜中的运动由于音叉的振动而抖动,不仅可以以基本抖动频率而且可以以其二次谐波调制来自样品表面的反射信号。通过锁定放大这些调制信号,即使使用未涂覆的光纤探头,也可以获得增强的光学图像。特别地,当检测到第二谐波信号时,获得了具有更高分辨率的精确光学图像,这是由于在尖端水平抖动运动的两倍频率下尖端样本分离的参数调制而产生的。使用轨道间距为0.74μm的DVD ROM作为测试样本,我们观察到凹坑周围的尖锐边缘被二次谐波信号清楚地分辨出来,并且在半最大值时获得了约70 nm全宽的增强分辨率。

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