Micromechanical analysis on residual stress-induced nanoindentation depth shifts in DLC films

Yun-Hee Lee; Kazuki Takashima; Dongil Kwon

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Micromechanical analysis on residual stress-induced nanoindentation depth shifts in DLC films

机译：DLC膜中残余应力引起的纳米压痕深度变化的微力学分析

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摘要

A depth change in nanoindentation curve by an influence of elastic residual stress was modeled as a reversible surface deformation by adopting an elastic contact mechanics for a flat punch. The model, however, yielded overestimated stresses for two diamond-like carbon films. The discrepancy was discussed from a viewpoint of irreversible deformation around the punch.

机译：通过对平冲头采用弹性接触机制，将受弹性残余应力影响的纳米压痕曲线深度变化建模为可逆表面变形。然而，该模型对两个类金刚石碳膜产生了高估的应力。从冲头周围不可逆变形的角度讨论了差异。

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《Scripta materialia》 |2004年第9期|共6页
作者
Yun-Hee Lee; Kazuki Takashima; Dongil Kwon;
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正文语种 eng
中图分类金属学与热处理;
关键词
diamond-like carbon film; nanoindentation; residual stresses;

机译：类金刚石碳膜;纳米压痕;残余应力;

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1. Micromechanical analysis on residual stress-induced nanoindentation depth shifts in DLC films [J] . Yun-Hee Lee, Kazuki Takashima, Dongil Kwon Scripta materialia . 2004,第9期

机译：DLC膜中残余应力引起的纳米压痕深度变化的微力学分析
2. Micromechanical Analysis of the Effect of Residual Stress on the Nanoindentation Curve [J] . Yun-Hee Lee, Dongil Kwon Journal of Korean Institute of Metal and Materials . 2002,第12期

机译：残余应力对纳米压痕曲线影响的微力学分析
3. The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis [J] . Sheng-Sheng Zhao, Hao Du, Wei-Gang Hua, Journal of Materials Research . 2007,第10期

机译：（Ti，Al）N膜中残余应力的深度分布：测量与分析
4. Depth Profiling of Mechanical Properties on the Nanoscale of Single-Layer and Stepwise Graded DLC Films by Nanoindentation and AFM [C] . C. Ziebert, S. Ulrich, M. Stueber Symposium Proceedings vol.875; Symposium on Thin Films-Stresses and Mechanical Properties XI; 20050328-0401; San Francisco,CA(US) . 2005

机译：通过纳米压痕和原子力显微镜对单层和逐步渐变DLC薄膜的纳米尺度上的力学性能进行深度剖析
5. Depth profiling residual stresses in thin tungsten films using x-ray diffraction. [D] . Ely, Thomas M. 1999

机译：使用X射线衍射分析钨薄膜中的深度轮廓残余应力。
6. Nanoindentation analysis of the micromechanical anisotropy in mouse cortical bone [O] . Michele Casanova, Anna Balmelli, Davide Carnelli, 2017

机译：小鼠皮质骨微机械各向异性的纳米压痕分析
7. Nanoindentation and nanofriction on DLC films [O] . Bec, Sandrine, Tonck, André, Fontaine, Julien 2007

机译：DLC薄膜上的纳米压痕和纳米摩擦

Micromechanical analysis on residual stress-induced nanoindentation depth shifts in DLC films

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