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首页> 外文期刊>Sensors and Actuators, A. Physical >Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever
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Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever

机译：微悬臂阵列水动力耦合对微悬臂梁动力响应影响的实验研究

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This study experimentally investigates the effect of hydrodynamic coupling of a micro-cantilever array on the dynamic response of a micro-cantilever. The micro-cantilever array consists of three harmonically driven micro-cantilevers dynamically coupled through air flow. The right cantilever and left cantilever (auxiliary-cantilevers) adjacent to the middle cantilever (operating-cantilever) are exploited to generate hydrodynamic force to change the air damping of operating-cantilever. Thus, the quality factor of operating-cantilever can be controlled by changing the phase and magnitude of excitation force on auxiliary-cantilevers, and varying the gap between auxiliary-cantilevers and operating-cantilever. In the experiment, magnetic actuated micro-cantilever arrays were fabricated and characterized. Measurements show the variation of quality factor of operating-cantilever is from -39% to +27%.
机译：这项研究实验研究了微悬臂阵列的流体动力学耦合对微悬臂梁动力响应的影响。微悬臂阵列由三个通过气流动态耦合的谐波驱动微悬臂组成。利用与中间悬臂（工作悬臂）相邻的右悬臂和左悬臂（辅助悬臂）来产生流体动力，从而改变工作悬臂的空气阻尼。因此，可以通过改变辅助悬臂梁上的激励力的相位和大小，以及改变辅助悬臂梁和工作悬臂梁之间的间隙来控制工作悬臂梁的品质因数。在实验中，制造并表征了磁致动微悬臂阵列。测量表明，操作悬臂的品质因数从-39％到+ 27％。

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