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首页> 外文期刊>Sensors and Actuators, A. Physical >A novel 6 x 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications
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A novel 6 x 6 element MEMS capacitive ultrasonic transducer with multiple moving membranes for high performance imaging applications

机译：新型6 x 6元件MEMS电容式超声换能器，具有多个移动膜，适用于高性能成像应用

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摘要

A 6 x 6 element multiple moving membrane capacitive micromachined ultrasonic transducer (M-3-CMUT) array has been developed for air-coupled detection purposes in the low megahertz frequency range. Unlike conventional capacitive MEMS transducers, the developed transducer array employs a novel cell configuration where more than one flexible membrane contributes in the transducer signal transmission and detection. In this structure, a stack of two vibrating membranes is suspended over a fixed grounded bottom electrode. The transducer array has been fabricated through employing a MEMS sacrificial technique, with the top and middle membrane radii of 65 and 42 mu m, respectively. The electrical, optical and acoustic evaluation results of this transducer array are presented in this paper. It is shown that using this configuration, the amplitude of membrane displacement is increased which enhances the transducer power output and sensitivity for a given bias condition. The experimental results demonstrate that this transducer array structure can be highly beneficial in high performance imaging application systems. (C) 2014 Elsevier B.V. All rights reserved.
机译：为了在低兆赫兹频率范围内进行空气耦合检测，已开发出6 x 6元件多动膜电容式微机械超声换能器（M-3-CMUT）阵列。与常规电容式MEMS换能器不同，开发的换能器阵列采用一种新颖的单元配置，其中多个柔性膜有助于换能器信号的传输和检测。在这种结构中，两个振动膜的堆叠悬挂在固定的接地底部电极上。换能器阵列是通过采用MEMS牺牲技术制成的，其顶部和中间膜半径分别为65和42μm。本文介绍了该换能器阵列的电，光和声评估结果。结果表明，使用这种配置，膜位移的幅度增加了，从而提高了传感器功率输出和给定偏置条件下的灵敏度。实验结果表明，这种换能器阵列结构在高性能成像应用系统中可能非常有用。 （C）2014 Elsevier B.V.保留所有权利。

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