High-resolution liquid volume detection in sub-nanoliter reactors

Hjelt KT.; Lubking W.; Vellekoop MJ.; van den Doel R.

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High-resolution liquid volume detection in sub-nanoliter reactors

机译：亚纳升反应器中的高分辨率液体体积检测

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Miniaturized reactors with volumes of 60 and 540 pi with integrated contact-less liquid volume detectors are fabricated on silicon. Aluminum electrodes are fabricated in the bottom of the reactors and covered with silicon nitride for electrical insulation. The reactors are formed in a 6-mu m thick SiO2 layer by dry etching. The liquid volumes in the reactors are determined by using an impedance measurement and compared to the optical fluorescence microscopy measurements for reference. The applicability of the measurement device for different liquid compositions and reactor size is studied. The presented contact-less measuring method can be used to measure sub-nanoliter liquid volumes with a resolution better than 1 pi. The integrated volume measurement method can be employed in miniaturized automated arrays in High Speed Screening (HSS) systems to determine the dispensed liquid volume. (C) 2000 Elsevier Science S.A. All rights reserved. [References: 9]

机译：体积为60和540 pi的小型反应器，带有集成的非接触式液体体积检测器，是在硅上制造的。铝电极制造在反应器的底部，并覆盖有氮化硅以实现电绝缘。通过干蚀刻在6μm厚的SiO 2层中形成反应器。通过使用阻抗测量来确定反应器中的液体体积，并将其与光学荧光显微镜测量结果进行比较以供参考。研究了该测量装置对不同液体成分和反应器尺寸的适用性。提出的非接触式测量方法可用于测量分辨率低于1 pi的亚纳升以下液体体积。集成的体积测量方法可用于高速筛分（HSS）系统中的小型自动化阵列中，以确定分配的液体体积。（C）2000 Elsevier Science S.A.保留所有权利。 [参考：9]

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《Sensors and Actuators, A. Physical》 |2000年第3期|共6页
作者
Hjelt KT.; Lubking W.; Vellekoop MJ.; van den Doel R.;
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正文语种 eng
中图分类自动化元件、部件;
关键词
Microreactor; Micro-array; Nanoliter; Picoliter; Volume detection; Aequorin;

机译：微反应器;微阵列;纳升;皮升;体积检测;水母发光蛋白;

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1. High-resolution liquid volume detection in sub-nanoliter reactors [J] . Kari T. Hjelt, Richard van den Doel, Wijnand Lubking Sensors and Actuators, A. Physical . 2000,第1a3期

机译：亚纳升反应器中的高分辨率液体体积检测
2. Heat capacity measurements of sub-nanoliter volumes of liquids using bimaterial microchannel cantilevers [J] . M. F. Khan, N. Miriyala, J. Lee, Applied Physics Letters . 2016,第21期

机译：使用双材料微通道悬臂测量亚纳升以下液体的热容量
3. Scalable microresonators for room-temperature detection of electron spin resonance from dilute, sub-nanoliter volume solids [J] . Nandita Abhyankar, Amit Agrawal, Pragya Shrestha, Science Advances . 2020,第44期

机译：用于室温检测电子自旋共振来自稀释，亚纳升体积固体的可缩放微谐振器
4. Measuring Liquid Volumes in Sub-nanoliter Wells [C] . Ian T. Young, Kari T. Hjelr, Richard van den Doel, Conference on Biomedical Instrumentation Based on Micro- and Nanotechnology Jan 24-25, 2001, San Jose, USA . 2001

机译：测量亚纳升井中的液体体积
5. Effects of Reactor Volume, Headspace Volume, and Inoculum Source on Methane Production from Biomethane Potential Tests [D] . Wright, Tyler J. 2021

机译：反应器体积，顶空体积和接种源对生物甲烷潜在试验的甲烷生产的影响
6. Scalable microresonators for room-temperature detection of electron spin resonance from dilute sub-nanoliter volume solids [O] . Nandita Abhyankar, Amit Agrawal, Pragya Shrestha, 2020

机译：用于室温检测电子自旋共振来自稀释亚纳升体积固体的可缩放微谐振器
7. Measuring Liquid Volumes in Sub-nanoliter Wells [O] . Ian T. Young, Kari T. Hjelt, Richard Van Den Doel, 2012

机译：测量亚纳升井中的液体体积
8. Leak testing plan for the Oak Ridge National Laboratory liquid low-level waste systems (active tanks): Revision 2. Volume 1: Regulatory background and plan approach; Volume 2: Methods, protocols, and schedules; Volume 3: Evaluation of the ORNL/LT-823DP differential pressure leak detection method; Appendix to Revision 2: DOE/EPA/TDEC correspondence [R] . Douglas, D. G. , Wise, R. F. , Starr, J. W. , 1994

机译：橡树岭国家实验室液体低放废物系统（活动罐）的泄漏测试计划：修订版2.第1卷：监管背景和计划方法;第2卷：方法，协议和时间表;第3卷：评估ORNL / LT-823Dp差压泄漏检测方法;修订版2的附录：DOE / Epa / TDEC通信

High-resolution liquid volume detection in sub-nanoliter reactors

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