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首页> 外文会议>Conference on Biomedical Instrumentation Based on Micro- and Nanotechnology Jan 24-25, 2001, San Jose, USA >Measuring Liquid Volumes in Sub-nanoliter Wells
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Measuring Liquid Volumes in Sub-nanoliter Wells

机译：测量亚纳升井中的液体体积

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摘要

We are developing a method for high-throughput screening using arrays of "nanowells" built into a silicon substrate. These wells can serve as bioreactors for studying a variety of biochemical reactions such as the enzymatic activity that occurs in yeast metabolism. For a variety of studies it is important to know the volume of liquid that has been deposited in a given well and/or to monitor the evaporation of the liquid. Using silicon as our substrate means that we can take advantage of the ability to build microelectronics into the wells in order to develop "smart" wells. The wells are manufactured on silicon wafers using conventional photolithography and etching techniques and typical wells measure 200 X 200 X 20 mu m~3 which is a volume of 800 pl. Aluminum electrodes are patterned on the floor of the wells. The floor as well as the electrodes are then covered by an electrical insulation layer. The complex impedance measured through the electrodes is then related to the volume of liquid in the wells. Using fluorescence microscopy as well as interference microscopy to calibrate our system, we can measure liquid volumes with an accuracy of about 5 percent and a resolution better than 1 pl. Real-time monitoring of fluid volumes in a collection of wells is possible by additional on-chip microelectronics which permits multiplexing the measurements over the bioreactor array.
机译：我们正在开发一种使用内置于硅基板中的“纳米孔”阵列进行高通量筛选的方法。这些孔可以用作生物反应器，以研究各种生化反应，例如酵母代谢中发生的酶活性。对于各种研究，重要的是要知道已沉积在给定孔中的液体量和/或监视液体的蒸发。使用硅作为衬底意味着我们可以利用将微电子器件构建到孔中的能力来开发“智能”孔。这些孔是使用常规的光刻和蚀刻技术在硅片上制造的，典型的孔尺寸为200 X 200 X 20μm〜3，即800 pl。铝电极在井底上有图案。地板以及电极随后被电绝缘层覆盖。然后，通过电极测得的复阻抗与孔中液体的体积有关。使用荧光显微镜和干涉显微镜来校准我们的系统，我们可以以大约5％的精度和优于1 pl的分辨率测量液体体积。通过附加的片上微电子技术，可以实时监控一组井中的流体体积，从而可以在生物反应器阵列上进行多重测量。

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