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首页> 外文期刊>Sensors and Actuators, A. Physical >Fabrication of micro tactile sensor for the measurement of micro-scale local elasticity
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Fabrication of micro tactile sensor for the measurement of micro-scale local elasticity

机译：用于测量微尺度局部弹性的微触觉传感器的制造

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In the recent past, atomic force microscopy (AFM) has been successfully applied to local elasticity measurement especially in biological fields. However, inevitable use of a cantilever results in difficulties in measurements and in sample preparation. Furthermore, the high cost of AFM systems prevents their widespread industrial and clinical use. In this paper, characteristics of local elasticity are evaluated by a new type of micro tactile sensor (NITS) developed with inexpensive and simple technology. NITS technology is based on simple ultrasonic contact sensing, and its high sensitivity is appropriate for micro-scale measurement. The sensor consists of a piezoelectric transducer and a needle-shaped 10-mum transduction point made with a glass needle. High stability and resolution are accomplished by applying a novel phase shift method. Young's modulus of objects can be derived by analyzing the change in resonance frequency of the system. Using silicone samples with different degrees of Young's modulus, a calibration equation for the NITS was calculated. Results show that with this novel NITS technology, micro-scale local elasticity measurement can be made without using conventional cantilever probes. (C) 2003 Elsevier B.V. All rights reserved. [References: 9]
机译：在最近的过去，原子力显微镜（AFM）已成功地应用于局部弹性测量，尤其是在生物领域。但是，不可避免地使用悬臂会导致测量和样品制备困难。此外，AFM系统的高成本阻止了它们在工业和临床上的广泛使用。在本文中，通过使用廉价且简单的技术开发的新型微触觉传感器（NITS）来评估局部弹性的特性。 NITS技术基于简单的超声波接触感应，其高灵敏度适用于微尺度测量。该传感器包括一个压电传感器和一个用玻璃针制成的针形10毫米换能点。通过应用新型相移方法可以实现高稳定性和分辨率。物体的杨氏模量可以通过分析系统共振频率的变化来推导。使用杨氏模量不同的有机硅样品，计算出NITS的校准方程式。结果表明，使用这种新的NITS技术，无需使用传统的悬臂探针即可进行微尺度的局部弹性测量。 （C）2003 Elsevier B.V.保留所有权利。 [参考：9]

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