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首页> 外文期刊>Sensors and Actuators, A. Physical >Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates
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Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates

机译：3D自组装微孔板用于自适应光学器件的连续膜大行程驱动

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An advanced 3D self-assembling technique of surface micromachined polysilicon structures is presented here aiming at the realization of dedicated large stroke actuators for optical applications. The 3D polysilicon microparts are self-assembled by beam buckling induced by integrated scratch drive actuator (SDA). With this technique, 380 mum x 250 mum microplates were lifted upward at 90 mum above substrate plane, Once the assembling has been performed, the 3D shapes are permanently kept by an integrated mechanical lock. Subsequent to the 3D assembling, microplates were successfully actuated by biasing underneath buried electrodes. Controlled motion up to +/-15degrees rotation was measured and analyzed by means of both analytical and numerical models. Long-term actuations were carried out without any observable changes even for 0.5 mum thin polysilicon structures. Therefore, 3D large stroke actuator has been implemented in a micro-optoelectromechanical system (MOEMS): a continuous membrane for adaptive optics application, This original device demonstrates, both positive and negative deflection with individual pixel displacement of +/-10 mum, which is one order of magnitude larger than usual approaches. The deformable mirror is constituted by a thin-film bulk-micromachined membrane that covers large stroke actuators composed of an array of self-assembling/self-locking 3D polysilicon electrostatic microplates. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 30]
机译：本文介绍了一种先进的表面微加工多晶硅结构3D自组装技术，旨在实现用于光学应用的专用大行程执行器。 3D多晶硅微零件是通过集成刮擦驱动执行器（SDA）引起的光束弯曲来自动组装的。通过这种技术，在基板平面上方90 m处向上提起380 m x 250 m的微孔板。完成组装后，通过集成的机械锁永久保持3D形状。 3D组装之后，通过偏置埋入电极下方成功地驱动了微孔板。借助于分析模型和数值模型，测量并分析了直至+/- 15度旋转的受控运动。即使对于0.5微米的薄多晶硅结构，也可以进行长期驱动而没有任何可观察到的变化。因此，已经在微光电系统（MOEMS）中实现了3D大行程执行器：一种用于自适应光学应用的连续膜。该原始设备演示了正向和负向偏转，单个像素位移为+/- 10微米，即比通常的方法大一个数量级变形镜由薄膜体微机械加工膜构成，该膜覆盖由一系列自组装/自锁定3D多晶硅静电微板组成的大行程执行器。 （C）2002 Elsevier Science B.V.保留所有权利。 [参考：30]

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