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Piezoelectric micro energy harvesters based on stainless-steel substrates

机译：基于不锈钢基材的压电微能量采集器

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摘要

In this paper, a piezoelectric micro energy harvester (PMEH) fabricated on stainless-steel substrates is presented. Through the design and fabrication of the PMEH, a high-quality lead zirconate titanate (PZT) thick film was directly deposited on the stainless-steel substrate by the aerosol deposition method at room temperature. After annealing, the PZT thick film on the stainless-steel substrate can achieve excellent ferroelectric properties for the high-efficiency PMEH presented. Furthermore, in order to study the impact of air damping on the power generating efficiency and the power transforming performance of our devices, a series of tests of the device under vacuum with different pressures were conducted and compared with working in atmosphere. The experimental results show that the device working in atmosphere (760 Torr) had a maximum output power of 200.28 μW with a 12.658 VP-P output voltage at an excitation frequency of 112.4 Hz under a 1.5g acceleration level, while working in a vacuum (0.01 Torr) it had a maximum output power of 241.60 μW with a 17.027 VP-P output voltage at an excitation frequency of 104.4 Hz under a 1.5g acceleration level. The energy densities of our device in vacuum and in atmosphere were calculated as 178.6 and 137.5 nJ mm~(-3).
机译：本文介绍了一种在不锈钢基底上制造的压电微能量收集器（PMEH）。通过PMEH的设计和制造，在室温下通过气溶胶沉积法将高质量的锆钛酸铅（PZT）厚膜直接沉积在不锈钢基板上。退火后，不锈钢基板上的PZT厚膜可以实现出色的铁电性能，以实现高效的PMEH。此外，为了研究空气阻尼对我们设备的发电效率和功率转换性能的影响，对设备在不同压力的真空下进行了一系列测试，并将其与在大气中工作进行了比较。实验结果表明，该设备在大气（760 Torr）下工作时最大输出功率为200.28μW，在1.5g加速度下在激发频率为112.4 Hz时具有12.658 VP-P输出电压，而在真空下工作时（ 0.01 Torr）的最大输出功率为241.60μW，在1.5g加速度下，在104.4 Hz的激励频率下具有17.027 VP-P输出电压。我们的设备在真空和大气中的能量密度经计算为178.6和137.5 nJ mm〜（-3）。

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