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首页> 外文期刊>Smart Materials & Structures >A piezoelectric linear ultrasonic motor with the structure of a circular cylindrical stator and slDEer
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A piezoelectric linear ultrasonic motor with the structure of a circular cylindrical stator and slDEer

机译：具有圆柱形定子和slDEer结构的压电线性超声波电动机

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摘要

A piezoelectric linear ultrasonic motor is proposed, with a cylindrical stator and slDEer structure. The length and diameter of the motor are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe. The stator is designed based on theoretical analyses and finite element method (FEM) simulation. The traveling wave propagation is obtained in the FEM simulation under the proper geometrical sizes, suitable boundary conditions and driving voltage signals. The trajectories of particles on the TFMG pipe are elliptical motion. In the experiment, a 25 mu m thick TFMG pipe is fabricated using the rotating magnetron sputtering technique and the vibration characteristics of the stator are measured by a laser Doppler vibrometer (LDV) system. BDEirectional motion of the slDEer is observed around 600 kHz, the maximum velocity is near to 40 mm s(-1) at 50 Vp-p for the loose slDEer and the maximum output force is 6 mN at 70 Vp-p for the tight slDEer.
机译：提出了一种具有圆柱形定子和slDEer结构的压电线性超声电动机。电机的长度和直径分别约为10毫米和1.5毫米。定子由两个通过薄膜金属玻璃（TFMG）管连接的压电陶瓷（PZT）管组成。基于理论分析和有限元方法（FEM）仿真来设计定子。在适当的几何尺寸，合适的边界条件和驱动电压信号下，通过FEM仿真获得行波传播。 TFMG管上的粒子轨迹是椭圆运动。在实验中，使用旋转磁控溅射技术制造了25微米厚的TFMG管，并通过激光多普勒振动计（LDV）系统测量了定子的振动特性。 BDEer的BDE方向运动约为600 kHz，对于松散的slDEer，最大速度在50 Vp-p时接近40 mm s（-1），在70 Vp-p时最大输出力为6 mN 。

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