Ion-beam sputtering of a graphite target in a discharge gas of high-purity N_2 has been used to produce C-N thin films. Quantitative analysis by Auger electron spectroscopy showed an average nitrogen content close to 30 at.%. Raman spectra confirmed that nitrogen is chemically bonded to carbon. Scanning electron microscopy images exhibited numerous crystals with grain sizes from 1 to 5 μm within the C-N films. Electron diffraction studies indicated that the crystals have a bcc structure with a lattice parameter a = 1.13 nm.
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