Material properties and interfacial composition of thin films of TiN and Ti(C, N) physically vapour-deposited on iron

Carbucicchio M; Martini C; Palombarini G; Rateo M; UNIV BOLOGNA IST MET I-40136 BOLOGNA ITALY.

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Material properties and interfacial composition of thin films of TiN and Ti(C, N) physically vapour-deposited on iron

机译：物理沉积在铁上的TiN和Ti（C，N）薄膜的材料特性和界面组成

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TiN and Ti(C, N) films were deposited on both Fe and a tool steel by two different physical vapour deposition techniques: electron-beam hollow cathode discharge and thermal are evaporation. The tribological behaviour of the coated samples were studied under dry-sliding conditions. The differences were explained by taking into account various properties of the films as well as the interfacial phenomena that occur at the film-substrate interface during the deposition step.

机译：TiN和Ti（C，N）膜通过两种不同的物理气相沉积技术沉积在Fe和工具钢上：电子束空心阴极放电和热蒸发。在干滑条件下研究了涂层样品的摩擦学行为。通过考虑膜的各种特性以及在沉积步骤中在膜-基底界面处发生的界面现象来解释差异。

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《Philosophical magazine, B. Physics of condensed matter, electronic, optical, and magnetic properties》 |1997年第4期|共8页
作者
Carbucicchio M; Martini C; Palombarini G; Rateo M; UNIV BOLOGNA IST MET I-40136 BOLOGNA ITALY.;
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正文语种 eng
中图分类物理学;
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TITANIUM;

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1. Material properties and interfacial composition of thin films of TiN and Ti(C, N) physically vapour-deposited on iron [J] . Carbucicchio M, Martini C, Palombarini G, Philosophical magazine, B. Physics of condensed matter, electronic, optical, and magnetic properties . 1997,第4期

机译：物理沉积在铁上的TiN和Ti（C，N）薄膜的材料特性和界面组成
2. Preparation and properties of Pb(Zr, Ti)O3 ferroelectric thin films and compositionally graded thin films on LaNiO3/Si substrates [J] . Li Jiankang, Yao Xi Journal of Electroceramics . 2008,第1a4期

机译：LaNiO3 / Si基体上Pb（Zr，Ti）O3 铁电薄膜的制备及其组成梯度薄膜
3. Influence of substrate temperature on the materials properties of reactive DC magnetron sputtered Ti/TiN multilayered thin films [J] . B. Subramanian, R. Ananthakumar, V.S. Vidhya, Materials Science and Engineering . 2011,第1期

机译：衬底温度对反应性直流磁控溅射Ti / TiN多层薄膜材料性能的影响
4. Effects of the Surface Compositions on Electrical Properties of Pb(Zr,Ti)O_3 Thin Films [C] . Y. Xuan, N. Wakiya, K. Shinozaki, Asian meeting on electroceramics . 2002

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Material properties and interfacial composition of thin films of TiN and Ti(C, N) physically vapour-deposited on iron

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