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首页> 外文期刊>Physica Scripta: An International Journal for Experimental and Theoretical Physics >Dynamics of the collisional sheath around a planar target with a trench
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Dynamics of the collisional sheath around a planar target with a trench

机译：带有沟槽的平面目标周围的碰撞鞘动力学

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摘要

Using a two-dimensional collisional fluid model, the dynamics of the collisional sheath is investigated when a zero-rise-time negative voltage pulse is applied to a planar target with a rectangular trench immersed in the plasma. In this investigation, the temporal evolution of the sheath edge, ion velocity, density distribution, incidence angle and ion flux along the trench surfaces (sidewall and bottom) are studied numerically for different degrees of ion collisionality during the time. The results obtained show that ion-neutral collisions affect the spatial distribution of the ion flux, ion velocity and, hence, ion impact energy on the surfaces of the trench differently (e.g., they cause the profiles of ion flux and ion velocity along the sidewall and bottom of the trench to be nonmonotonic and monotonic, respectively). Moreover, ion-neutral collisions cause the magnitude of the ion impact energy and the ion flux along the bottom and sidewall of the trench to decrease. Furthermore, ion-neutral collisions weaken the dependence of the ion velocity along the trench surfaces on time. In addition, it is shown that ion-neutral collisions maintain the deviation of the sheath edge from the straight line for long time and decrease the incidence angle of the ions on the trench surfaces. Moreover, we show that the incidence angle of the ions decreases in the presence of collisions and, regardless of neutral gas pressure, this angle is more oblique near the corners of the trench. Additionally, it is shown that the ion density increases near the convex corner of the trench in both collisional and collisionless sheaths. Also, it is found that the sheath expansion near the convex corner is slower than that in the concave corner.
机译：使用二维碰撞流体模型，当将零上升时间负电压脉冲施加到具有浸入等离子体的矩形沟槽的平面目标时，研究了碰撞鞘的动力学。在这项研究中，针对不同时间的离子碰撞程度，对沿沟槽表面（侧壁和底部）的护套边缘，离子速度，密度分布，入射角和离子通量的时间演化进行了数值研究。获得的结果表明，离子中性碰撞会影响离子通量的空间分布，离子速度，因此会影响沟槽表面上的离子碰撞能量（例如，它们会引起离子通量和离子速度沿侧壁的分布）和沟槽底部分别为非单调和单调）。而且，离子中性碰撞导致离子冲击能量的大小和沿着沟槽的底部和侧壁的离子通量减小。此外，离子中性碰撞减弱了沿沟槽表面的离子速度对时间的依赖性。另外，表明离子中性碰撞长时间保持鞘边缘与直线的偏离并减小了离子在沟槽表面上的入射角。此外，我们表明离子的入射角在存在碰撞的情况下减小，并且无论中性气体压力如何，该角在沟槽的拐角处都更倾斜。另外，显示出在碰撞和无碰撞护套中，离子密度在沟槽的凸角附近增加。而且，发现在凸角附近的护套膨胀比在凹角处的护套膨胀慢。

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