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首页> 外文期刊>Physica status solidi, B. Basic research >Novel carbon nanotube network deposition technique for electronic device fabrication
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Novel carbon nanotube network deposition technique for electronic device fabrication

机译:用于电子器件制造的新型碳纳米管网络沉积技术

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摘要

We present a novel dry and room-temperature method for the deposition of random carbon nanotube networks (CNTNs) onto various substrates. This method is based on natural charging of carbon nanotube (CNT) bundles in the gas-phase and their efficient deposition directly downstream of the synthesis reactor by means of an electric field. The density of the deposited CNTNs was controllably adjusted by varying the deposition time and the electric field strength. Application of this deposition technique for the fabrication of single-walled CNTN-based field-effect transistors (FETs), where a random CNTN serves as a transport channel, is presented. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
机译:我们提出了一种新颖的干燥和室温下的方法,用于将随机碳纳米管网络(CNTN)沉积到各种基材上。该方法基于气相中碳纳米管(CNT)束的自然充电以及它们在电场作用下直接在合成反应器下游的有效沉积。通过改变沉积时间和电场强度,可控制地调整沉积CNTN的密度。介绍了这种沉积技术在制造基于单壁CNTN的场效应晶体管(FET)的应用,其中随机CNTN用作传输通道。 (C)2008 WILEY-VCH Verlag GmbH&Co.KGaA,Weinheim

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