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首页> 外文期刊>Physica, B. Condensed Matter >Structural investigations of sputter deposited thin films: reflection mode EXAFS, specular and non specular X-ray scattering
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Structural investigations of sputter deposited thin films: reflection mode EXAFS, specular and non specular X-ray scattering

机译：溅射沉积薄膜的结构研究：反射模式EXAFS，镜面和非镜面X射线散射

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The extended X-ray absorption fine structure technique (EXAFS) in the reflection mode was used for the ex situ investigation of sputter deposited thin films on float glass substrates. We show that a detailed analysis of the reflectivity fine structure enables the extraction of short-range order structural information such as bond distances, coordination numbers and Debye-Waller factors. The surface roughness and the density of the thin films were determined from specular and non-specular X-ray scattering experiments. Polycrystalline Ag and Au films prepared by DC-sputtering in Ar atmospheres were investigated to show the potential of the technique. Both systems reveal a polycrystalline short-range order structure similar to that of the respective bulk materials. In contrast. amorphous structures with significantly reduced densities were found for Ta2O5 thin films prepared by reactive sputtering in pure O-2-atmospheres. (C) 2000 Elsevier Science B.V. All rights reserved. [References: 18]
机译：反射模式下的扩展X射线吸收精细结构技术（EXAFS）用于在浮法玻璃基板上溅射沉积的薄膜的非原位研究。我们表明，对反射率精细结构的详细分析能够提取短距离结构信息，例如键距，配位数和Debye-Waller因子。薄膜的表面粗糙度和密度是通过镜面和非镜面X射线散射实验确定的。研究了在Ar气氛中通过直流溅射制备的多晶Ag和Au薄膜，以显示该技术的潜力。这两个系统都揭示了一种类似于各个块状材料的多晶短程有序结构。相反。对于在纯O-2-气氛中通过反应溅射制备的Ta2O5薄膜，发现了密度显着降低的非晶结构。 （C）2000 Elsevier Science B.V.保留所有权利。 [参考：18]

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