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首页> 外文期刊>Physica, C. Superconductivity and its applications >THE EFFECT OF YBA2CU3O7-X TARGET PROPERTIES ON THE SUPERCONDUCTING CHARACTERISTICS OF LASER ABLATION DEPOSITED THIN FILMS
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THE EFFECT OF YBA2CU3O7-X TARGET PROPERTIES ON THE SUPERCONDUCTING CHARACTERISTICS OF LASER ABLATION DEPOSITED THIN FILMS

机译：YBA2CU3O7-X靶材性能对激光烧蚀沉积薄膜超导特性的影响

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Pulsed-laser deposition has been demonstrated to be an advantageous technique for producing high-quality superconducting YBCO thin films. In this technique, the quality of the YBCO thin films is strongly dependent on various processing conditions such as substrate temperature, laser energy density, ambient oxygen pressure, and pulse repetition rate, all of which have been previously investigated. However, it has been also found that the laser target is one of the key factors in the fabrication of high-quality YBa2Cu3O7-x (YBCO) thin films. In the systematic identification of this effect, nine different YBCO targets have been studied. Both the YBCO targets from various sources and the corresponding YBCO thin films deposited under optimized conditions have been characterized and compared by their structure, composition and electronic properties. This investigation has indicated that impurity phases (liquid phase, 211 and CuO) in the targets play different roles, though the sintered targets as a whole were stoichiometric. The superconducting transition temperature (T-c) of YBCO thin films decreased as the liquid phase (BaCuO2-CuO, which is yttrium deficient) in the YBCO bulk target increased. T-c of the thin films may also decrease with the presence of the 211 phase in the targets, however, the CuO phase in the YBCO target may actually increase T-c of the thin films. [References: 12]
机译：已经证明脉冲激光沉积是用于生产高质量超导YBCO薄膜的有利技术。在这种技术中，YBCO薄膜的质量在很大程度上取决于各种处理条件，例如基板温度，激光能量密度，环境氧气压力和脉冲重复频率，所有这些都已在先前进行了研究。但是，还发现激光靶是制造高质量YBa2Cu3O7-x（YBCO）薄膜的关键因素之一。在对该效果的系统鉴定中，研究了九种不同的YBCO目标。来自各种来源的YBCO靶材和在优化条件下沉积的相应YBCO薄膜均已通过结构，组成和电子性能进行了表征和比较。这项研究表明，尽管烧结靶总体上是化学计量的，但靶中的杂质相（液相，211和CuO）起着不同的作用。 YBCO薄膜的超导转变温度（T-c）随着YBCO体靶中液相（BaCuO2-CuO，钇缺乏）的增加而降低。薄膜的T-c也可以随着靶中211相的存在而降低，但是，YBCO靶中的CuO相实际上可以增加薄膜的T-c。 [参考：12]

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